\begin{document}$ 5\times {10}^{9}{\mathrm{p}}{\mathrm{h}}{\mathrm{o}}{\mathrm{t}}{\mathrm{o}}{\mathrm{s}}/(\dot{}\dot{}) $\end{document}. The X-ray source provides illumination for the sample after being focused by an ellipsoidal condenser. The outer ring of the condenser's illumination ring corresponds to a numerical aperture (NA) of \begin{document}$ {NA}_{2} = 3.196mrad $\end{document}, and the inner ring corresponds to a numerical aperture of \begin{document}$ {NA}_{1} = 1.9086mrad $\end{document}. Under these conditions, the limit resolution of this TXM instrument is 22 nm. The zone plate has a diameter of 70μm, a focal length of 8.7mm, and 616 zones. The TXM instrument uses a high-resolution optical coupling detector equipped with a scientific-grade CMOS camera with an effective pixel size of 7.52μm. The optical coupling detector is equipped with 2× and 10× high numerical aperture objectives. When the TXM instrument magnification is 50×, the effective pixel size of the TXM instrument is 15 nm. In addition , a gold resolution test card is used as the sample to determine the imaging field of view of the TXM instrument by observing the size of the imaging area of the test card on the detector, and to determine the imaging resolution of the TXM instrument by observing the line width of the star-shaped target in the center of the test card. Experimental results show that the TXM instrument has an imaging field of view of 26μm and can achieve the clear imaging of characteristic structure with a line width of 30 nm. The radial power spectrum curve of the Siemens Star test card imaging results shows that the maximum resolution of TXM instrument is 28.6 nm. Finally, we draw some conclusions and present outlook. At present, imaging of 30-nm-wide line features has been realized, but the imaging of 30-nm half pitch line pair feature has not yet been achieved, and the limit resolution has not reached the design value, either. We will continue to explore the potential for upgrading the imaging resolution of the laboratory TXM in future work."> - 必威体育下载

Search

Article

x

留言板

姓名
邮箱
手机号码
标题
留言内容
验证码

downloadPDF
Citation:

Liao Ke-Liang, He Qi-Li, Song Yang, Li Rong-Gang, Song Mao-Hua, Li Pan-Yun, Zhao Hai-Feng, Liu Peng, Zhu Pei-Ping
PDF
HTML
Get Citation
Metrics
  • Abstract views:156
  • PDF Downloads:6
  • Cited By:0
Publishing process
  • Received Date:24 May 2024
  • Accepted Date:08 July 2024
  • Available Online:09 August 2024

    返回文章
    返回
      Baidu
      map