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Abstract

Refractive index sensors based on metal metasurfaces are commonly limited by their low quality factors due to significant Ohmic losses in the metal material. In contrast, sensors based on all-dielectric metasurfaces can overcome this disadvantage. Currently, all-dielectric metesurface sensors based on symmetry-protected bound states in the continuum (BIC) have aroused intense research interest due to their ability to achieve ultrahigh quality factors. Such a metasurface sensor is mainly based on single BIC and single form of symmetry breaking. There are few studies on metasurface sensors of multiple BICs and multiple forms of symmetry breaking. In additon, the refractive-index sensors commonly neglect the influence of temperature fluctuation and thus suffer the crosstalk between the refractive index and temperature of the environment. In this work, an all-dielectric metasurface composed of a periodic array of asymmetric semicircular-cylinder pairs is designed and two quasi-bound states in the continuum (QBIC) with high quality factors are obtained. By choosing three different forms of symmetry breaking (two in-plane and one out-of-plane), two robust QBIC modes can be generated in the selected near-infrared frequency band, and their resonance wavelengths, quality factors and polarization dependences exhibit different characteristics. Full-wave simulation results show that by measuring the resonance wavelengths of the two QBICs (denoted by QBIC1 and QBIC2), two-parameter sensing of refractive index and temperature can be achieved, which then solves the problem of crosstalk between the refractive index and temperature of the environment in refractive-index sensing. The dependence of quality factor on asymmetric parameters follows an inverse quadratic relation for the two QBICs. By adjusting the asymmetric parameters, the quality factor can be theoretially increased to any value, so that the sensing performance can be improved and adjusted. For refractive-index sensing, the QBIC1 can achieve a sensitivity of 194.7 nm/RIU and a highest figure of merit (FOM) of 8197 (corresponding to a quality factor of 45829); the QBIC2 can achieve a sensitivity of 170 nm/RIU, and a highest FOM of 4970 (corresponding to a quality factor of 28097). For temperature sensing, the QBIC1 can achieve a sensitivity of 7.77 pm/℃, and the QBIC2 can achieve a sensitivity of 24 pm/℃.

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Authors and contacts

Corresponding author:Liu Hui-Gang,liuhg@nankai.edu.cn; Zhao Er-Gang,egang@nankai.edu.cn; Liu Hai-Tao,liuht@nankai.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 62075104).

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References

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不对称参数	模式	共振波长/nm	折射率传感灵敏度/(nm·RIU^–1)	Q	FOM
α= 8 nm (β=γ= 0)	M_x	906.01	123	86	11.7
	M_y	917.51	139.2	88	13.4
	QBIC1	985.28	194.7	30125	5953
	QBIC2	912.97	161.5	28097	4970
β= 6 nm (α=γ= 0)	M_x	906.08	128	83.4	11.8
	M_y	917.45	141	80.5	12.4
	QBIC1	984.01	174	45829	8197
	QBIC2	911.69	160.3	6639	1143
γ= 2 nm (α=β= 0)	M_x	908.63	134	72.8	10.7
	M_y	922.01	138	78.7	11.8
	QBIC1	991.35	172	41417	7186
	QBIC2	915.35	170	7572	1406

DownLoad: CSV

不对称参数	QBIC1温度传感灵敏度/(pm·℃^–1)	QBIC2温度传感灵敏度/(pm·℃^–1)
β= 2 nm	13.19	23.5
β= 4 nm	12.51	23.3
β= 6 nm	6.81	23.19
α= 3 nm	7.43	23.39
α= 5 nm	7.43	23.31
α= 8 nm	7.27	23.19
γ= 2 nm	7.77	24.0
γ= 3 nm	8.0	24.31
γ= 5 nm	8.27	24.69

DownLoad: CSV

不对称参数	$\Delta {n_{{\mathrm{set}}}}$	$ \Delta {T}_{{\mathrm{set}}}/ $℃	$\Delta {\lambda _1}/{\mathrm{nm}}$	$\Delta {\lambda _2}/{\mathrm{nm}}$	$\Delta {n_{{\mathrm{cal}}}}$	$ \Delta {T}_{{\mathrm{cal}}}/ $℃	$ {\delta _n} $	$ {\delta _T} $
β= 6 nm	0.015	20	2.52	3.06	0.0149	20.57	–0.67%	2.85%
	0.02	20	3.35	3.945	0.0202	19.56	1%	–2.2%
	0.01	40	1.84	2.66	0.0097	41.99	–3%	4.975%
	0.02	40	3.50	4.41	0.0202	38.70	1%	–3.25%
	0.01	60	1.99	3.12	0.00984	60.82	–1%	1.37%
α= 8 nm	0.015	20	2.615	3.085	0.0148	20.758	–1.33%	3.79%
	0.02	20	3.475	3.97	0.0201	19.23	0.5%	–3.85%
	0.01	40	1.92	2.67	0.0098	41.35	–2%	3.375%
	0.02	40	3.63	4.43	0.0202	38.33	1%	–4.175%
	0.01	60	2.07	3.13	0.00981	60.79	–1.9%	1.317%
γ= 2 nm	0.015	20	2.72	3.08	0.01482	20.90	–1.2%	4.5%
	0.02	20	3.61	3.96	0.020	19.84	0%	–0.8%
	0.01	40	2.01	2.69	0.0098	41.05	–2%	2.625%
	0.02	40	3.78	4.44	0.0201	38.93	1%	–2.675%
	0.01	60	2.17	3.17	0.00984	60.76	–1.6%	1.27%

DownLoad: CSV

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Vol. 73, Issue 4 - 2024-02-20

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