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Abstract

Plasma simulation is important in studying the plasma discharge systematically, especially the anode layer ion source which has the complex geometrical characteristics of the discharge structure. However, owing to the complex solution domain formed by the geometric profile of the anode and cathode, the traditional simulation models show extremely small computational efficiency and poor convergence. This work presents a separate simulation for the ion source structure and the plasma discharge, separately, where the cathode geometric parameters (including the size, the shape and the relative position of the inner and outer cathodes) are simplified into two magnetic mirror parameters (the magnetic mirror ratio R _mand the magnetic induction intensity in the center of the magnetic mirror B ₀), and then a high-efficient particle-in-cell/Monte Carlo collision (PIC/MCC) model is established to improve the computational efficiency and stability of the plasma simulation later. As a result, the convergence time of the plasma simulation is shortened significantly from 1.00 μs to 0.45 μs, and by which the influences of the geometrical characteristics of the discharge structure on the plasma properties are systematically studied. The simulation results reveal that magnetic mirror with R _m= 2.50 and B ₀= 36 mT can best confine the plasma in the central area between the inner cathode and outer cathode. When the discharge center of the plasmacoincides with the magnetic mirror center, the anode layer ion source presents both high density output of ion beam current and significantly reduced cathode etching, suggesting that the best balance is obtained between the output and cathode etching.

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Authors and contacts

Corresponding author:Wu Zhong-Zhen,wuzz@pku.edu.cn

Funds:Project supported by the Science and Technology Research Plan of Shenzhen, China (Grant Nos. SGDX20201103095406024, JSGG20191129112631389), the Sustainable Supporting Funds for Colleges and Unversities in 2022, China (Grant No. 20220810143642004), the Research Start-up Fund of Introducing Talent of Peking University Shenzhen Graduate School, China (Grant No. 1270110273), and the Postdoctoral Research Fund Project after Outbound of Shenzhen, China (Grant No. 2129933651).

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References

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Cited By

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反应方程式	反应速率系数k_r/(m³⋅s^–1)	反应能量阈值/eV	反应类型
e + Ar → Ar + e	$2.336 \times {10^{ - 14} }{T_{\text{e} } }^{1.609} \times \exp \big[ {0.0618{ {\left( {\ln {T_{\text{e} } } } \right)}^2} - 0.1171{ {\left( {\ln {T_{\text{e} } } } \right)}^3} } \big]$	—	弹性碰撞
e + Ar → Ar⁺+ 2e	$2.34 \times {10^{ - 14} }{T_{\text{e} } }^{0.59} \times \exp \left( { - 17.44/{T_{\text{e} } } } \right)$	15.76	电离碰撞

DownLoad: CSV

反应方程式	反应类型
Ar⁺+ Ar → Ar⁺+ Ar	弹性碰撞
Ar⁺+ Ar → Ar + Ar⁺	电荷交换

DownLoad: CSV

反应方程式	反应速率系数k_r/(m³⋅s^–1)	反应能量阈值/eV	反应类型
e + Ar → Ar + e	$ 2.336 \times {10^{ - 14}}{T_{\text{e}}}^{1.609} \times \exp \left[ {0.0618{{\left( {\ln {T_{\text{e}}}} \right)}^2} - 0.1171{{\left( {\ln {T_{\text{e}}}} \right)}^3}} \right] $	—	弹性碰撞
e + Ar → Ar⁺+ 2e	$ 2.34 \times {10^{ - 14}}{T_{\text{e}}}^{0.59} \times \exp \left( { - 17.44/{T_{\text{e}}}} \right) $	15.76	电离碰撞
e + Ar → Ar^m+ e	$ 2.5 \times {10^{ - 15}}{T_{\text{e}}}^{0.74} \times \exp \left( { - 11.56/{T_{\text{e}}}} \right) $	11.56	激发碰撞
e + Ar^m→ Ar⁺+ 2e	$ 6.8 \times {10^{ - 15}}{T_{\text{e}}}^{0.67} \times \exp \left( { - 4.2/{T_{\text{e}}}} \right) $	4.20	激发态电离
e + Ar^m→ Ar + e	$ 4.3 \times {10^{ - 16}}{T_{\text{e}}}^{0.74} $	–11.56	退激发碰撞
Ar⁺+ Ar → Ar⁺+ Ar	硬球模型	—	弹性碰撞
Ar⁺+ Ar → Ar + Ar⁺	硬球模型	—	电荷交换

DownLoad: CSV

h_ac/mm	阴极溅射离子占比/%	输出离子占比/%	输出离子数/阴极溅射离子数	等离子体峰值密度/(10¹⁶m^–3)	放电中心坐标/mm	放电面积/mm²
2	53.8	43.8	0.81	4.02	(31.1, 57.9)	209.3
6	51.8	47.0	0.91	3.06	(31.3, 55.8)	188.0
10	40.6	59.3	1.46	1.78	(31.6, 54.8)	155.0
14	34.4	65.6	1.90	0.68	(32.1, 53.6)	90.0
18	24.3	75.6	3.10	0.34	(32.8, 52.9)	38.4

DownLoad: CSV

d_ac/mm	阴极溅射离子占比/%	输出离子占比/%	输出离子数/阴极溅射离子数	内外阴极溅射强度比	等离子体峰值密度/(10¹⁶m^–3)	放电中心坐标/mm	放电面积/mm²
2	51.0	47.5	0.93	1.38	3.72	(31.3, 55.9)	208.4
6	48.1	50.9	1.06	1.19	3.26	(31.4, 55.4)	199.5
10	40.6	59.3	1.46	0.99	1.78	(31.6, 54.8)	155.0
14	32.8	67.2	2.05	0.74	0.72	(31.7, 53.8)	103.1
18	25.7	74.2	2.88	0.52	0.26	(33.4, 53.4)	14.2

DownLoad: CSV

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Vol. 72, Issue 8 - 2023-04-20

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