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Abstract

Flexible electronics have aroused great interest of researchers because of their wide applications in information storage, energy harvesting and wearable device. To realize extraordinary functionalities, freestanding single crystal oxide thin film is utilized due to its super elasticity, easy-to-transfer, and outstanding ferro/electric/magnetic properties. Using the state-of-art synthesis methods, functional oxide films of various materials can be obtained in freestanding phase, which eliminates the restrictions from growth substrate and is transferable to other flexible layers. In this work, we first introduce wet etching and mechanical exfoliation methods to prepare freestanding single crystal oxide thin film, then review their applications in ferroelectric memory, piezoelectric energy harvester, dielectric energy storage, correlated oxide interface, and novel freestanding oxide structure. The recent research progress and future outlooks are finally discussed.

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Authors and contacts

Corresponding author:Dong Guo-Hua,guohuadong@xjtu.edu.cn; Liu Ming,mingliu@xjtu.edu.cn

Funds:Project supported by the National Key Research and Development Program of China (Grant No. 2022YFB3205701), the National Natural Science Foundation of China (Grant Nos. U22A2019, 91964109, 52002310), and the Innovation Team Support Project of Shaanxi Province, China (Grant No. 2021TD-12).

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Cited By

DownLoad: Full-Size Img PowerPoint

存储器件	材料体系	开关电压/V	开关比	保持特性/min	铁电功能层厚度/nm	柔性	文献
FTJs	PVDF	+2/–2	3—10	—	2.2—4.4	是	[67]
	Pt/BTO/LSMO	+2/–3	3	120	3.6	是	[61]
	Pt/PZT/PEDOT:PSS	+3.5/–3	10	—	4.8	是	[62]
	Pt/PZT/SRO/mica	+6/–6	2.4—108	35	—	是	[68]
	Au/Cu/BTO/LSMO/BTO/Si	+3/–2	100	30	2.8	否	[69]
Fe FET	MoS₂/BTO/Au/Ti/SiO₂/Si	+50/–50	10	—	48	否	[65]
Fe FET	Pt/ZnO/PZT/SRO/CFO/mica	+6/–6	1.4×10⁴	—	180	是	[70]

DownLoad: CSV

压电材料	开路电压/V	短路电流/μA	电流密度/(μA·cm^–2)	功率密度/(μW·cm^–3)	文献
PZT film/PET	200	1.5	150	17500	[24]
PMN-PT film/PET	8.2	145	—	—	[75]
BTO film/PU/Plastic	1	0.026	0.19	7000	[19]
TOS-BTO Nanoparticles(Nps) /PVDF	20	—	—	15.6	[78]
PMMA@BTO Nanowires(Nws)/PVDF-TrFE	12.6	1.3	—	0.68	[79]
BTO@HBP@PMMA Nws/PVDF	3.4	0.32	—	—	[80]

DownLoad: CSV

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Vol. 72, Issue 9 - 2023-05-05

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