[1] |
Dong Zheng-Qiong, Zhao Hang, Zhu Jin-Long, Shi Ya-Ting.Influence of incident illumination on optical scattering measurement of typical photoresist nanostructure. Acta Physica Sinica, 2020, 69(3): 030601.doi:10.7498/aps.69.20191525 |
[2] |
Zha Bing-Ting, Yuan Hai-Lu, Ma Shao-Jie, Chen Guang-Song.Influence of single-beam expanding scanning laser circumferential detection system parameters on detection capability. Acta Physica Sinica, 2019, 68(7): 070601.doi:10.7498/aps.68.20181860 |
[3] |
Wang Dan, Ye Ming, Feng Peng, He Yong-Ning, Cui Wan-Zhao.An effective reduction on secondary electron emission yield of gold coated surfaces by laser etching. Acta Physica Sinica, 2019, 68(6): 067901.doi:10.7498/aps.68.20181547 |
[4] |
Liu Fang, Li Yun-Xiang, Huang Yi-Dong.Nanolithography based on two-surface-plasmon-polariton-absorption. Acta Physica Sinica, 2017, 66(14): 148101.doi:10.7498/aps.66.148101 |
[5] |
Pan An, Wang Dong, Shi Yi-Shi, Yao Bao-Li, Ma Zhen, Han Yang.Incoherent ptychography in Fresnel domain with simultaneous multi-wavelength illumination. Acta Physica Sinica, 2016, 65(12): 124201.doi:10.7498/aps.65.124201 |
[6] |
Huang Cheng-Long, Zhang Ji-Cheng, Diao Kai-Di, Zeng Yong, Yi Yong, Cao Lei-Feng, Wang Hong-Bin.Fabrication and optical property characterization of quantum-dot-array diffraction grating with single order diffraction based on focused ion beam. Acta Physica Sinica, 2014, 63(1): 018101.doi:10.7498/aps.63.018101 |
[7] |
Chen Xiu-Guo, Liu Shi-Yuan, Zhang Chuan-Wei, Wu Yi-Ping, Ma Zhi-Chao, Sun Tang-You, Xu Zhi-Mou.Accurate measurement of templates and imprinted grating structures using Mueller matrix ellipsometry. Acta Physica Sinica, 2014, 63(18): 180701.doi:10.7498/aps.63.180701 |
[8] |
Jiang Hao, Zhang Xin-Ting, Guo Cheng-Shan.Lensless coherent diffractive imaging with a Fresnel diffraction pattern. Acta Physica Sinica, 2012, 61(24): 244203.doi:10.7498/aps.61.244203 |
[9] |
Wang Jian-Bo, Qian Jin, Yin Cong, Shi Chun-Ying, Lei Ming.Method of identifying the relative position between standing wave of laser light and substrate in atom lithography. Acta Physica Sinica, 2012, 61(19): 190601.doi:10.7498/aps.61.190601 |
[10] |
Sun Li-Yuan, Gao Zhi-Yuan, Zou De-Shu, Zhang Lu, Ma Li, Tian Liang, Shen Guang-Di.The optimization of lithography process on the deep muti-stepped surface. Acta Physica Sinica, 2012, 61(20): 206801.doi:10.7498/aps.61.206801 |
[11] |
Qiu Ke-Qiang, Liu Zheng-Kun, Xu Xiang-Dong, Liu Ying, Hong Yi-Lin, Fu Shao-Jun.Standing wave in holographic lithography. Acta Physica Sinica, 2012, 61(1): 014204.doi:10.7498/aps.61.014204 |
[12] |
Hong Xiao-Gang, Xu Wen-Dong, Li Xiao-Gang, Zhao Cheng-Qiang, Tang Xiao-Dong.Numerical simulation of probe induced surface plasmon resonance coupling nanolithography. Acta Physica Sinica, 2008, 57(10): 6643-6648.doi:10.7498/aps.57.6643 |
[13] |
Qian Qi, Wang Yan, Zhang Qin-Yuan, Yang Zhong-Min, Yang Gang-Feng, Jiang Zhong-Hong.Optical characterization of ultraviolet laser photosensitive Er3+-doped bismuth-silicate glasses. Acta Physica Sinica, 2007, 56(5): 2736-2741.doi:10.7498/aps.56.2736 |
[14] |
Peng Xiang, Wei Heng-Zheng, Zhang Peng.Chosen plaintext attack on double random-phase encoding in the Fresnel domain. Acta Physica Sinica, 2007, 56(7): 3924-3930.doi:10.7498/aps.56.3924 |
[15] |
Tao Wei-Dong, Wang Biao.Design of an improved Fresnel prism. Acta Physica Sinica, 2006, 55(3): 1126-1129.doi:10.7498/aps.55.1126 |
[16] |
Xiao Pei, Zhang Zeng-Ming, Sun Xia, Ding Ze-Jun.Monte Carlo simulation of electron transmission through masks in projection electron lithography. Acta Physica Sinica, 2006, 55(11): 5803-5809.doi:10.7498/aps.55.5803 |
[17] |
Sun Xia, You Si-Fang, Xiao Pei, Ding Ze-Jun.Simulation of the proximity effect of electron beam lithography. Acta Physica Sinica, 2006, 55(1): 148-154.doi:10.7498/aps.55.148 |
[18] |
Chen Lei-Ming, Guo Yan-Feng, Guo Xi, Tang Wei-Hua.Molds for nanoimprinting made by modified photoresist. Acta Physica Sinica, 2006, 55(12): 6511-6514.doi:10.7498/aps.55.6511 |
[19] |
Li Yu-Tong, Zhang Jie, Lu Xin, Jin Zhan, Pepler D. A., Danson C. N..Generation of axial line-focus using a binary-phase Fresnel zone plate. Acta Physica Sinica, 2005, 54(5): 2030-2033.doi:10.7498/aps.54.2030 |
[20] |
WU JIN-YUAN, WANG CHENG-HAO, HE QI-GUANG.FOCUSING AND SCANNING PROPERTIES OF ACOUSTIC BEAM IN SOLID USING A FRESNEL ARRAY. Acta Physica Sinica, 1988, 37(10): 1575-1584.doi:10.7498/aps.37.1575 |