- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

Abstract

Coherent diffractive imaging (CDI) using ultra-short wavelength light source has become an three-dimensional(3D) nanoimaging technique. In CDI, a target sample is first illuminated by a coherent EUV and soft X-ray light, then the diffraction pattern is recorded by using a charge coupled device (CCD), and finally the image of the sample is obtained based on the pattern by using a phase retrieval algorithm. Of the many currently available coherent EUV and soft X-ray light sources, the high-order harmonic generation (HHG) is the simplest in structure, the lowest in cost, and most compact in size. Therefore, it has become the most promising light source for CDI. Through years of development, HHG based CDI technique(HHG-CDI) has become an outstanding 3D nano-imaging technique with the advantages of no aberration, no damage, and no contact either, and it also possesses the extra-capabilities of probing the dynamics, chemical composition and quantum information in various semiconductor and quantum devices. We believe that the HHG-CDI will soon become a generic nano-imaging tool that can complement or even replace the matured nanoimaging techniques, such as atomic force, near field, X-ray, electron, or scanning tunneling microscopes.

Keywords:

Authors and contacts

Corresponding author:Zhang Xiao-Shi,zhangxs@aircas.ac.cn

Funds:Project supported by the Short Pulse Laser Technology Team of Condition Guarantee and Finance Bureau, Chinese Academy of Sciences(Grant No. GJJSTD20200009), the National Key R&D Program of China (Grant No. 2021YFB3602600), the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 62005291), and the Chinese Academy of Science Pioneer Hundred Talents Program (Grant No. 2018-131-S).

FullText HTML: translate this paragraph

References

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]
[68]
[69]
[70]
[71]
[72]
[73]
[74]
[75]
[76]
[77]
[78]
[79]
[80]
[81]
[82]
[83]
[84]
[85]
[86]
[87]
[88]
[89]
[90]
[91]
[92]

Cited By

DownLoad: Full-Size Img PowerPoint

纳米成像技术	分辨率/nm	光源	镜头	样品损伤/ 预处理	表面3D 形貌	镀层下结构/ 层厚度检测	化学成分/浓度	成像速度
光学显微镜	～100	红外, 可见光	透镜	无损伤无需处理	可探测	部分可探测/ 透明料可以	可探测/半导体不可	快
X射线显微镜	～20	SRS, XFEL	波带片	有损伤无需处理	不能探测	均可实现	可探测	慢
扫描电子显微镜	～0.1	电子束	磁透镜	有损伤需处理	可探测	金属层不可/厚度不可	无法探测	较慢
原子力显微镜	～0.1 nm	无	纳米探针	无损伤无需处理	可探测	无法探测	无法探测	最慢
HHG-CDI	<10 nm	SRS, FEL.HHG	无透镜	无损伤无需处理	可探测	均可探测	可探测	快

DownLoad: CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]
[68]
[69]
[70]
[71]
[72]
[73]
[74]
[75]
[76]
[77]
[78]
[79]
[80]
[81]
[82]
[83]
[84]
[85]
[86]
[87]
[88]
[89]
[90]
[91]
[92]

[1]	Huang Yu-Hang, Chen Li-Xiang.Fractional Fourier transform imaging based on untrained neural networks. Acta Physica Sinica, 2024, 73(9): 094201.doi:10.7498/aps.73.20240050
[2]	Qi Nai-Jie, He Xiao-Liang, Wu Li-Qing, Liu Cheng, Zhu Jian-Qiang.Effect of detector photoelectric parameters on ptychographic iterative engine. Acta Physica Sinica, 2023, 72(15): 154202.doi:10.7498/aps.72.20230603
[3]	Wu Di, Jiang Zi-Zhen, Yu Huan-Huan, Zhang Chen-Shuang, Zhang Jiao, Lin Dan-Ying, Yu Bin, Qu Jun-Le.Quantitative phase microscopy imaging based on fractional spiral phase plate. Acta Physica Sinica, 2021, 70(15): 158702.doi:10.7498/aps.70.20201884
[4]	Xu Wen-Hui, Ning Shou-Cong, Zhang Fu-Cai.Review of partially coherent diffraction imaging. Acta Physica Sinica, 2021, 70(21): 214201.doi:10.7498/aps.70.20211020
[5]	Zhou Guang-Zhao, Hu Zhe, Yang Shu-Min, Liao Ke-Liang, Zhou Ping, Liu Ke, Hua Wen-Qiang, Wang Yu-Zhu, Bian Feng-Gang, Wang Jie.Preliminary exploration of hard X-ray coherent diffraction imaging method at SSRF. Acta Physica Sinica, 2020, 69(3): 034102.doi:10.7498/aps.69.20191586
[6]	Ge Yin-Juan, Pan Xing-Chen, Liu Cheng, Zhu Jian-Qiang.Technique of detecting optical components based on coherent modulation imaging. Acta Physica Sinica, 2020, 69(17): 174202.doi:10.7498/aps.69.20200224
[7]	Qi Jun-Cheng, Chen Rong-Chang, Liu Bin, Chen Ping, Du Guo-Hao, Xiao Ti-Qiao.Grating based X-ray phase contrast CT imaging with iterative reconstruction algorithm. Acta Physica Sinica, 2017, 66(5): 054202.doi:10.7498/aps.66.054202
[8]	Li Yuan-Jie, He Xiao-Liang, Kong Yan, Wang Shou-Yu, Liu Cheng, Zhu Jian-Qiang.Shearing interferometric electron beam imaging based on ptychographic iterative engine method. Acta Physica Sinica, 2017, 66(13): 134202.doi:10.7498/aps.66.134202
[9]	Xiao Jun, Li Deng-Yu, Wang Ya-Li, Shi Yi-Shi.Ptychographical algorithm of the parallel scheme. Acta Physica Sinica, 2016, 65(15): 154203.doi:10.7498/aps.65.154203
[10]	Guan Zhong, Li Wei, Wang Guo-Li, Zhou Xiao-Xin.Study of high-order harmonic generation in crystals exposed to laser fields. Acta Physica Sinica, 2016, 65(6): 063201.doi:10.7498/aps.65.063201
[11]	Yu Wei, He Xiao-Liang, Liu-Cheng, Zhu Jian-Qiang.Ptychographic iterative engine with the incoherent illumination. Acta Physica Sinica, 2015, 64(24): 244201.doi:10.7498/aps.64.244201
[12]	He Xiao-Liang, Liu Cheng, Wang Ji-Cheng, Wang Yue-Ke, Gao Shu-Mei, Zhu Jian-Qiang.Study on the periodic error in ptychographic iterative engine imaging. Acta Physica Sinica, 2014, 63(3): 034208.doi:10.7498/aps.63.034208
[13]	Wang Ya-Li, Shi Yi-Shi, Li Tuo, Gao Qian-Kun, Xiao Jun, Zhang San-Guo.Research on the key parameters of illuminating beam for imaging via ptychography in visible light band. Acta Physica Sinica, 2013, 62(6): 064206.doi:10.7498/aps.62.064206
[14]	Lu Fa-Ming, Xia Yuan-Qin, Zhang Sheng, Chen De-Ying.Investigation of tunable coherent XUV light source by high harmonics generation using intense femtosecond laser pulses in Ne. Acta Physica Sinica, 2013, 62(2): 024212.doi:10.7498/aps.62.024212
[15]	Liu Cheng, Pan Xing-Chen, Zhu Jian-Qiang.Coherent diffractive imaging based on the multiple beam illumination with cross grating. Acta Physica Sinica, 2013, 62(18): 184204.doi:10.7498/aps.62.184204
[16]	Fan Jia-Dong, Jiang Huai-Dong.Coherent X-ray diffraction imaging and its applications in materials science and biology. Acta Physica Sinica, 2012, 61(21): 218702.doi:10.7498/aps.61.218702
[17]	Jiang Hao, Zhang Xin-Ting, Guo Cheng-Shan.Lensless coherent diffractive imaging with a Fresnel diffraction pattern. Acta Physica Sinica, 2012, 61(24): 244203.doi:10.7498/aps.61.244203
[18]	Wang Chen, Zheng Wu-Di, Fang Zhi-Heng, Sun Jin-Ren, Wang Wei, Xiong Jun, Fu Si-Zu, Gu Yuan, Wang Shi-Ji, Qiao Xiu-Mei, Zhang Guo-Ping.Shadow imaging studies on laser-ablated foil target by using an X-ray laser. Acta Physica Sinica, 2010, 59(7): 4767-4773.doi:10.7498/aps.59.4767
[19]	Li Hui-Shan, Li Peng-Cheng, Zhou Xiao-Xin.Role of potential function in high order harmonic generation of model hydrogen atoms in intense laser field. Acta Physica Sinica, 2009, 58(11): 7633-7639.doi:10.7498/aps.58.7633
[20]	Yu Bin, Peng Xiang, Tian Jin-Dong, Niu Han-Ben.Phase retrieval for hard x-ray in-line phase contrast imaging. Acta Physica Sinica, 2005, 54(5): 2034-2037.doi:10.7498/aps.54.2034

Catalog

Vol. 71, Issue 16 - 2022-08-20

Metrics

Abstract views:10136
PDF Downloads:343
Cited By:0

Search

Article