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Abstract

Aiming at three-dimensional (3D) sensing applications such as LiDAR, high power density five-junction cascaded vertical cavity surface emitting lasers (VCSELs) with 905 nm wavelength are designed and fabricated. The maximum power conversion efficiency is 55.2% for an individual VCSEL emitter with 8 μm oxide aperture. And the maximum slope efficiency of the device is 5.4 W/A, which is approximately 5 times that of traditional single-junction VCSEL with the same aperture. Under the condition of narrow pulse (pulse width 5.4 ns, duty cycle 0.019%) injection, the peak output power of 19-element array (20 μm oxidation aperture for each element) reaches 58.3 W, and the corresponding power density is as high as 1.62 kW/mm ². The devices with various apertures (8–20 μm) are characterized. The results show that the maximum slope efficiencies of all these devices are greater than 5.4 W/A and the maximum PCE is higher than 54%. These high-performance VCSEL devices can be used as ideal light sources for 3D sensing applications such as LiDAR.

Keywords:

905 nm vertical cavity surface emitting lasers/
multi-junction cascade/
high power density/
3-dimensional sensing

Authors and contacts

Corresponding author:Xun Meng,xunmeng@ime.ac.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant Nos. 62104251, 62174178), the China Postdoctoral Science Foundation (Grant Nos. BX20200358, 2021M703442), the Key Research Program of Frontier Sciences, Chinese Academy of Sciences (Grant No. ZDBS-LYJSC031), and the Youth Innovation Promotion Association, Chinese Academy of Sciences (Grant No. 2022115).

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Vol. 71, Issue 20 - 2022-10-20

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