- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

Abstract

Based on the laser manipulation of electron beam, the steady-state micro-bunching (SSMB) mechanism promises an electron bunch length six orders of magnitude smaller than that in a conventional storage ring. With the combination of the strong coherent characteristic of the radiation from micro-bunching and the high repetition rate of a storage ring, high-average-power, narrow-band coherent radiation with wavelengths ranging from THz to soft X-ray can be expected from an SSMB ring. Such a novel light source can provide unprecedented opportunities for accelerator photon science and industry applications like extreme ultraviolet (EUV) lithography. In this paper, the SSMB concept and its potential, the progress of SSMB proof-of-principle experiment, the key physics issues and technical challenges of an SSMB ring, the Tsinghua SSMB-EUV light source and its potential revolutionary influence on scientific research and EUV lithography are all reviewed. Some important results of the SSMB research achieved by us are also presented.

Keywords:

Authors and contacts

Corresponding author:Tang Chuan-Xiang,tang.xuh@tsinghua.edu.cn

Funds:Project supported by the Tsinghua University Initiative Scientific Research Program, China (Grant No. 20191081195) and the National Natural Science Foundation of China (Grant No. 12035010)

FullText HTML: translate this paragraph

References

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]

Cited By

DownLoad: Full-Size Img PowerPoint

技术参数	单位	设计指标
储存环周长	m	100—150
电子束能量	MeV	$\geqslant 400$
束流强度	A	$\geqslant 1$
辐射波长	nm	5—100
13.5 nm EUV功率 (2%带宽内)	kW	$\geqslant 1$
13.5 nm EUV峰值/ 平均亮度	phs/s/mm²/mrad²/ 0.1%b.w.	$> 10^{23}$

DownLoad: CSV

光源原理	主要特点
LPP	技术成熟, 已商业化, EUV光功率最高500 W左右, 难以支撑下一代光刻技术的进一步发展
SR	技术成熟, 成本较低, 但EUV光功率达不到EUV光刻大规模量产需求
SRF-FEL	EUV光功率可达1—10 kW量级, 造价相对高昂(数十亿), 规模较大(数百米),
SRF-FEL	商业化必须做能量回收(ERL), 实现大功率EUV输出, 还需许多技术突破
SSMB	EUV光功率可大于1 kW, 造价(数亿到十亿)及规模(周长$100—150$ m)适中,
	作为一种全新的光源原理, 原理实验验证已经实现, 需要建设运行在EUV波段的
	SSMB加速器光源研究装置, 培养科学及产业用户, 并提高其技术成熟度

DownLoad: CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]

[1]	Luo Yan, Yu Xuan, Lei Jian-Ting, Tao Chen-Yu, Zhang Shao-Feng, Zhu Xiao-Long, Ma Xin-Wen, Yan Shun-Cheng, Zhao Xiao-Hui.Fragmentation mechanism of methane dehydrogenation channel induced by extreme ultraviolet and high charge ions. Acta Physica Sinica, 2024, 73(4): 044101.doi:10.7498/aps.73.20231377
[2]	Lei Jian-Ting, Yu Xuan, Shi Guo-Qiang, Yan Shun-Cheng, Sun Shao-Hua, Wang Quan-Jun, Ding Bao-Wei, Ma Xin-Wen, Zhang Shao-Feng, Ding Jing-Jie.Photoionization of Ne and Xe atoms induced by extreme ultraviolet photons. Acta Physica Sinica, 2022, 71(14): 143201.doi:10.7498/aps.71.20220341
[3]	Hu Yang, Sun Jiang, Zhang Jin-Hai, Cai Dan, Yang Hai-Liang, Su Zhao-Feng, Sun Tie-Ping, Sun Jian-Feng, Zhao Bo-Wen.Methods of calculating radial collapse velocity of short-γdiode field on Qiangguang-I accelerator. Acta Physica Sinica, 2021, 70(18): 185202.doi:10.7498/aps.70.20210472
[4]	Hai Bang, Zhang Shao-Feng, Zhang Min, Dong Da-Pu, Lei Jian-Ting, Zhao Dong-Mei, Ma Xin-Wen.A tabletop experimental system for investigating ultrafast atomic dynamics based on femtosecond extreme ultraviolet photons. Acta Physica Sinica, 2020, 69(23): 234208.doi:10.7498/aps.69.20201035
[5]	Tian Yong-Shun, Hu Zhi-Liang, Tong Jian-Fei, Chen Jun-Yang, Peng Xiang-Yang, Liang Tian-Jiao.Design of beam shaping assembly based on 3.5 MeV radio-frequency quadrupole proton accelerator for boron neutron capture therapy. Acta Physica Sinica, 2018, 67(14): 142801.doi:10.7498/aps.67.20180380
[6]	Dou Yin-Ping, Xie Zhuo, Song Xiao-Lin, Tian Yong, Lin Jing-Quan.Experimental research on laser-produced Gd target plasma source for 6.7 nm lithography. Acta Physica Sinica, 2015, 64(23): 235202.doi:10.7498/aps.64.235202
[7]	Lu Fa-Ming, Xia Yuan-Qin, Zhang Sheng, Chen De-Ying.Investigation of tunable coherent XUV light source by high harmonics generation using intense femtosecond laser pulses in Ne. Acta Physica Sinica, 2013, 62(2): 024212.doi:10.7498/aps.62.024212
[8]	Zhao Yong-Peng, Xu Qiang, Xiao De-Long, Ding Ning, Xie Yao, Li Qi, Wang Qi.Time behavior and optimum conditions for the Xe gas extreme ultraviolet source. Acta Physica Sinica, 2013, 62(24): 245204.doi:10.7498/aps.62.245204
[9]	Zhou Shao-Tong, Li Jun, Huang Xian-Bin, Cai Hong-Chun, Zhang Si-Qun, Li Jing, Duan Shu-Chao, Zhou Rong-Guo.Experimental investigation of radiation charactristics of Ti wire X-pinch X-ray source on Yang accelerator. Acta Physica Sinica, 2012, 61(16): 165202.doi:10.7498/aps.61.165202
[10]	Cai Yi, Wang Wen-Tao, Yang Ming, Liu Jian-Sheng, Lu Pei-Xiang, Li Ru-Xin, Xu Zhi-Zhan.Experimental study on extreme ultraviolet light generation from high power laser-irradiated tin slab. Acta Physica Sinica, 2008, 57(8): 5100-5104.doi:10.7498/aps.57.5100
[11]	Wang Zhi, Chen Jia-Er, Yan Xue-Qing, Lu Yuan-Rong, Fang Jia-Xun, Guo Zhi-Yu.Relation between dynamic parameters and limiting current in separated function radio frequency quadrupole accelerator. Acta Physica Sinica, 2006, 55(12): 6298-6301.doi:10.7498/aps.55.6298
[12]	Yang Hai-Liang, Qiu Ai-Ci, Li Jing-Ya, Sun Jian-Feng, He Xiao-Ping, Tang Jun-Ping, Wang Hai-Yang, Huang Jian-Jun, Ren Shu-Qing, Zou Li-Li, Yang Li.Energy spectra of high-power ion beams measured with a pile of thin films on FLASH Ⅱ. Acta Physica Sinica, 2005, 54(9): 4072-4078.doi:10.7498/aps.54.4072
[13]	Zhu Lun-Wu, Weng Jia-Qiang, Gao Yuan, Fang Jin-Qing.. Acta Physica Sinica, 2002, 51(7): 1483-1488.doi:10.7498/aps.51.1483
[14]	GAO YUAN, WENG JIA-QIANG, FANG JIN-QING, LUO XIAO-SHU.A METHOD OF MULTI PERIODICAL INTERVAL CONTROL BEAM HALO-CHAOS BY WAVELET FEEDBACK CONTROL FUNCTION. Acta Physica Sinica, 2001, 50(8): 1440-1446.doi:10.7498/aps.50.1440
[15]	ZENG GUI-HUA, XU ZHI-ZHAN.A NEW TYPE ACCELERATOR. Acta Physica Sinica, 1997, 46(12): 2384-2388.doi:10.7498/aps.46.2384
[16]	DONG BI-ZHEN, ZHEN SHI-HAI, YANG GUO-ZHEN.A SIMULATION EXPERIMENT OF PHASE ADJUSTMENT FOR A PHASE-ADJUSTED FOCUSING LASER ACCELERATOR. Acta Physica Sinica, 1982, 31(7): 895-903.doi:10.7498/aps.31.895
[17]	GIH KWANG-TA, CHOU HSI-TING, CHANG YUAN-CHENG, HO KUO-CHU.PERIODIC FOCUSING EFFECT IN DC ACCERLERATORS. Acta Physica Sinica, 1965, 21(4): 736-747.doi:10.7498/aps.21.736
[18]	YEH MING-HAN, SUN LIANG-FANG, SHYU CHIEN-MING, CHIN CHIEN-CHUNG, YEH LONG-FEI, CHEN JYH-CHEN, CHEN CHIEN-POU, SHAH GUANG-CHANG, YU CHUEH-HSIEN, LI ZHENG-WU, CHAO CHUNG-YAO.A PROTON ELECTROSTATIC ACCELERATOR. Acta Physica Sinica, 1963, 19(1): 60-69.doi:10.7498/aps.19.60
[19]	.ПРИНЦИПЫ И ПРИБОРЫ ИЗМЕРЕНИЯ РАДИУСА РАВНОВЕСНОЙ ОРБИТЫ В БЕТАТРОНЕ. Acta Physica Sinica, 1961, 17(7): 329-339.doi:10.7498/aps.17.329
[20]	SEN QING-HE, JIANG SONG-SHENG, GU YI-PAN.PULSED MODULATION OF CYCLOTRON ION BEAM. Acta Physica Sinica, 1960, 16(2): 94-97.doi:10.7498/aps.16.94

Catalog

Vol. 71, Issue 15 - 2022-08-05

Metrics

Abstract views:70462
PDF Downloads:3274
Cited By:0

Search

Article