[1] |
Tian Shan-Shan, Gao Qian, Gao Ze-Ran, Xiong Yu-Chen, Cong Ri-Dong, Yu Wei.Design of back-contact interface of CIGS solar cells by single-target magnetron sputtering. Acta Physica Sinica, 2024, 73(17): 178801.doi:10.7498/aps.73.20240732 |
[2] |
Lu Yang-Dan, Lü Jian-Guo, Yang Ru-Qi, Lu Bo-Jing, Zhu Li-Ping, Ye Zhi-Zhen.Transparent conductive ZnO:Al/Cu mesh composite film and its electric heating performance. Acta Physica Sinica, 2022, 71(18): 187304.doi:10.7498/aps.71.20220529 |
[3] |
Tang Hua-Jie, Zhang Jin-Min, Jin Hao, Shao Fei, Hu Wei-Qian, Xie Quan.Influence of sputtering power on the optical properties of metal manganese film. Acta Physica Sinica, 2013, 62(24): 247803.doi:10.7498/aps.62.247803 |
[4] |
Wang Yong-Jun, Li Hong-Xuan, Ji Li, Liu Xiao-Hong, Wu Yan-Xia, Zhou Hui-Di, Chen Jian-Min.Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering. Acta Physica Sinica, 2012, 61(5): 056103.doi:10.7498/aps.61.056103 |
[5] |
Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang.Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering. Acta Physica Sinica, 2012, 61(2): 028104.doi:10.7498/aps.61.028104 |
[6] |
Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun.Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica, 2012, 61(16): 165101.doi:10.7498/aps.61.165101 |
[7] |
Cao Yue-Hua, Di Guo-Qing.Analysis of Y2O3 doped TiO2 films topography prepared by radio frequency magnetron sputtering. Acta Physica Sinica, 2011, 60(3): 037702.doi:10.7498/aps.60.037702 |
[8] |
Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying.Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputtering. Acta Physica Sinica, 2011, 60(6): 067304.doi:10.7498/aps.60.067304 |
[9] |
Mu Zong-Xin, Mu Xiao-Dong, Jia Li, Wang Chun, Dong Chuang.Electrostatic oscillation and coupling resonance in double trap of unbalanced magnetron sputtering. Acta Physica Sinica, 2010, 59(10): 7164-7169.doi:10.7498/aps.59.7164 |
[10] |
Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang.An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica, 2009, 58(6): 4109-4116.doi:10.7498/aps.58.4109 |
[11] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng.Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica, 2008, 57(3): 1796-1801.doi:10.7498/aps.57.1796 |
[12] |
Li Yue-Fu, Ye Hui, Fu Xing-Hai.RF magnetron sputtering deposition growth of highly orientated strontium barium niobate thin films. Acta Physica Sinica, 2008, 57(2): 1229-1235.doi:10.7498/aps.57.1229 |
[13] |
Xin Ping, Sun Cheng-Wei, Qin Fu-Wen, Wen Sheng-Ping, Zhang Qing-Yu.Room-temperature photoluminescence of ZnO/MgO multiple quantum wells deposited by reactive magnetron sputtering. Acta Physica Sinica, 2007, 56(2): 1082-1087.doi:10.7498/aps.56.1082 |
[14] |
.The effect of temperature of substrate and oxygen partial pressure on V2O5 films fabricated by magnetron sputtering. Acta Physica Sinica, 2007, 56(12): 7255-7261.doi:10.7498/aps.56.7255 |
[15] |
.Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering. Acta Physica Sinica, 2007, 56(12): 7188-7194.doi:10.7498/aps.56.7188 |
[16] |
Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu.Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering. Acta Physica Sinica, 2006, 55(4): 1965-1973.doi:10.7498/aps.55.1965 |
[17] |
Ding Wan-Yu, Xu Jun, Li Yan-Qin, Piao Yong, Gao Peng, Deng Xin-Lü, Dong Chuang.Characterization of silicon nitride films prepared by MW-ECR magnetron sputtering. Acta Physica Sinica, 2006, 55(3): 1363-1368.doi:10.7498/aps.55.1363 |
[18] |
Zhou Xiao-Li, Du Pi-Yi.CaCu33Ti44O1212 films prepared by magnetron s puttering. Acta Physica Sinica, 2005, 54(4): 1809-1813.doi:10.7498/aps.54.1809 |
[19] |
Mu Zong-Xin, Li Guo-Qing, Qin Fu-Wen, Huang Kai-Yu, Che De-Liang.The model of the magnetic mirror effect in the unbalanced magnetron sputtering ion beams. Acta Physica Sinica, 2005, 54(3): 1378-1384.doi:10.7498/aps.54.1378 |
[20] |
.. Acta Physica Sinica, 2002, 51(2): 406-409.doi:10.7498/aps.51.406 |