Ultra-high vacuum measurement and extremely high vacuum (UHV/XHV) measurement play an important role in high-tech fields such as deep space exploration, particle accelerators, and nanoscience; with the continuous extension of the lower limit of measurement, especially when it reaches the order of 10 ^–10Pa, higher requirements are placed on the accuracy of the measurement. At present, in the field of UHV/XHV measurement, ionization gauges based on the principle of neutral gas ionization are commonly applied to the vacuum measurement. However, traditional ionization vacuum gauges during use can create electronic excitation desorption effects, soft X-rays, and the effect of hot cathode outgassing, thereby affecting the accuracy of measurement and limiting the lower limit of measurement. Compared with the traditional measurement technology, this method uses the relationship between the loss rate and pressure caused by the collision of cold atoms trapped in the trap depth with the background gas to calculate the gas density and inversely calculate the vacuum pressure. Based on the intrinsic quantum mechanical properties of cold atom collisions, this method is expected to be developed into a new vacuum traceability standard. In this paper, based on the small-angle approximation and impulse approximation under the quantum scattering theory, the loss rate coefficient of the collision of ⁶Li cold atoms with background gas molecules is calculated. According to the ideal gas equation, the pressure inversion formula is obtained. The collision loss rate is extracted by accurately fitting the loss curve of the cold atom. In order to improve the accuracy of vacuum inversion and reduce the influence of quantum diffractive collision on loss rate measurement, the trap depth under the conditions of a certain cooling laser intensity, detuning, and magnetic field gradient is determined by the photoassociation method. Finally, in a range of 1 × 10 ^–8–5 × 10 ^–6Pa, the inverted pressure value is compared with the measured value of the ionization meter, proving that this method has good accuracy and reliability in the inversion of vacuum pressure. At present, the main factor restricting the improvement of accuracy is the influence of the collision between the excited atoms in the magneto-optical trap and the background gas on the loss rate measurement. In the future, with the proportion of excited atoms and the excited state C ₆coefficient to be precisely determined, the uncertainty of vacuum pressure measurement can be further reduced.