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Abstract

Diamond has a wide band gap, high carrier mobility, and high thermal conductivity, thereby possessing great potential applications in high power, and high temperature electronics devices, and also inhigh temperature logic circuit. In this work, we fabricate a hydrogen terminated diamond metal-oxide-semiconductor field effect transistor (MOSFET) by using the atomic layer deposition grown Al ₂O ₃as a gate dielectric and passivation layer. The device has a gate length and width of 4 μm and 50 μm, respectively. The device delivers a maximum output current of about 113.4 mA/mm at V _GSof –6 V and an ultra-high on/off ratio of 10 ⁹. In addition, we fabricate three resistors, respectively, with an interelectrode distance of 20, 80 and 160 μm, corresponding to the resistance value of 16.7, 69.5 and 136.4 kΩ, respectively. The logic inverter is realized by combining the MOSFET with the load resistance, and the characteristics of the logic inverter are demonstrated successfully, which indicates that the diamond MOSFET has great potential applications in future logic circuits.

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Corresponding author:Ren Ze-Yang,zeyangren@xidian.edu.cn

Funds:Project supported by the National Special Fund for Magnetic Confinement Nuclear Fusion Energy R&D Program (Grant No. 2019YFE03100200), the National Natural Science Foundation of China (Grant Nos. 62127812, 62004148, 61874080), the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2009ZYHW0015), the Natural Science Basic Research Program of Shanxi Province, China (Grant Nos. 2020JQ-315, 2018ZDCXL-GY-01-01-02, 2019ZDLGY16-02), and the China Postdoctoral Science Foundation (Grant No. 2021TQ0256).

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Al₂O₃ 厚度/nm	生长温度/℃	L_G/μm	L_GD/μm	电流密度 /(mA·mm^–1)	参考文献
6	80	0.1	—	585.0	[8]
20	200	2.0	2	339.0	[14]
20	300	2.0	2	85.0	[14]
25	300	2.0	2	339.0	[17]
83	450	5.0	20	12.0	[23]
200	450	20.0	10	18.2	[24]
200	450	2.0	17	120.0	[25]
200	450	6.0	6	12.0	[6]
200	450	15.0	24	5.2	[10]
400	450	2.0	17	59.0	[26]
15	300	4.0	2	113.4	本工作

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Vol. 71, Issue 8 - 2022-04-20

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