- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

Abstract

Capacitively coupled plasma (CCP) has gain wide attention due to its important applications in industry. The researches of CCP mainly focus on the discharge characteristics and plasma parameters under different discharge conditions to obtain a good understanding of the discharge, find good methods of controlling the charged particle properties, and improve the process performance and efficiency. The controlling of plasma parameters is based on the following three aspects: gas, chamber, and power source. Changing these discharge conditions can directly influence the sheath dynamics and the charged particle heating process, which can further influence the electron and ion distribution functions, the plasma uniformity, and the production of neutral particles, etc. Based on a review of the recent years’ researches of CCP, the electron heating dynamics and several common methods of controlling the plasma parameters, i.e. voltage waveform tailoring, realistic secondary electron emission, and magnetized capacitively coupled plasma are introduced and discussed in detail in this work.

Keywords:

Authors and contacts

Corresponding author:Song Yuan-Hong,songyh@dlut.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant Nos. 12020101005, 11975067) and the China Scholarship Council (Grant No. 201906060024)

FullText HTML: translate this paragraph

References

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]
[68]
[69]
[70]
[71]
[72]
[73]
[74]
[75]
[76]
[77]
[78]
[79]
[80]
[81]
[82]
[83]
[84]
[85]
[86]
[87]
[88]
[89]
[90]
[91]
[92]
[93]
[94]
[95]
[96]
[97]
[98]
[99]
[100]
[101]
[102]
[103]
[104]
[105]
[106]
[107]
[108]
[109]
[110]
[111]
[112]
[113]
[114]
[115]
[116]
[117]
[118]
[119]
[120]
[121]
[122]
[123]
[124]
[125]
[126]
[127]
[128]
[129]
[130]
[131]
[132]
[133]
[134]
[135]
[136]
[137]
[138]
[139]
[140]

Cited By

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

DownLoad: Full-Size Img PowerPoint

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]
[41]
[42]
[43]
[44]
[45]
[46]
[47]
[48]
[49]
[50]
[51]
[52]
[53]
[54]
[55]
[56]
[57]
[58]
[59]
[60]
[61]
[62]
[63]
[64]
[65]
[66]
[67]
[68]
[69]
[70]
[71]
[72]
[73]
[74]
[75]
[76]
[77]
[78]
[79]
[80]
[81]
[82]
[83]
[84]
[85]
[86]
[87]
[88]
[89]
[90]
[91]
[92]
[93]
[94]
[95]
[96]
[97]
[98]
[99]
[100]
[101]
[102]
[103]
[104]
[105]
[106]
[107]
[108]
[109]
[110]
[111]
[112]
[113]
[114]
[115]
[116]
[117]
[118]
[119]
[120]
[121]
[122]
[123]
[124]
[125]
[126]
[127]
[128]
[129]
[130]
[131]
[132]
[133]
[134]
[135]
[136]
[137]
[138]
[139]
[140]

[1]	Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong.Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasma. Acta Physica Sinica, 2023, 72(16): 165202.doi:10.7498/aps.72.20230686
[2]	Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong.Numerical investigation of SiO₂film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica, 2022, 71(17): 170201.doi:10.7498/aps.71.20220493
[3]	Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu.Axial diagnosis of radio-frequency capacitively coupled Ar/O₂plasma. Acta Physica Sinica, 2021, 70(11): 115204.doi:10.7498/aps.70.20202113
[4]	Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864
[5]	Hu Yan-Ting, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian.Effect of phase angle on plasma characteristics in electrically asymmetric capacitive discharge. Acta Physica Sinica, 2018, 67(22): 225203.doi:10.7498/aps.67.20181400
[6]	Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203
[7]	Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu.Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model. Acta Physica Sinica, 2014, 63(18): 185205.doi:10.7498/aps.63.185205
[8]	Wang Jian-Wei, Song Yi-Xu, Ren Tian-Ling, Li Jin-Chun, Chu Guo-Liang.Molecular dynamics simulation of Lag effect in fluorine plasma etching Si. Acta Physica Sinica, 2013, 62(24): 245202.doi:10.7498/aps.62.245202
[9]	Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208
[10]	Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204
[11]	Li Pei-Juan, Zhou Wei-Wei, Tang Yuan-Hao, Zhang Hua, Shi Si-Qi.Electronic structure，optical and lattice dynamical properties of CeO2：A first-principles study. Acta Physica Sinica, 2010, 59(5): 3426-3431.doi:10.7498/aps.59.3426
[12]	Chen Yu-Hui, Wang Yang, Zuo Fang-Yuan, Lai Tian-Shu, Wu Yi-Qun.The electron dynamics of semimetal Sb films. Acta Physica Sinica, 2009, 58(5): 3548-3552.doi:10.7498/aps.58.3548
[13]	Yang Juan, Xu Ying-Qiao, Zhu Liang-Ming.Diagnostic study on the electron density distribution of microwave plasma jet in local vacuum environment. Acta Physica Sinica, 2008, 57(3): 1788-1791.doi:10.7498/aps.57.1788
[14]	.Study of the harmonics of coherent transition radiation emitted by hot electrons generated in ultra-intense laser plasma interaction due to different heating mechanism. Acta Physica Sinica, 2007, 56(12): 7132-7137.doi:10.7498/aps.56.7132
[15]	Hao Zuo-Qiang, Yu Jin, Zhang Jie, Yuan Xiao-Hui, Zheng Zhi-Yuan, Yang Hui, Wang Zhao-Hua, Ling Wei-Jun, Wei Zhi-Yi.Acoustic diagnostics of plasma channels in air induced by intense femtosecond laser pulses. Acta Physica Sinica, 2005, 54(3): 1290-1294.doi:10.7498/aps.54.1290
[16]	XIA JIANG-FAN, ZHANG JUN, ZHANG JIE.MODELING THE ASTROPHYSICAL DYNAMICAL PROCESS WITH LASER-PLASMAS. Acta Physica Sinica, 2001, 50(5): 994-1000.doi:10.7498/aps.50.994
[17]	Liu Ming-Hai, Hu Xi-Wei, Wu Qin-Chong, Yu Guo-Yang.. Acta Physica Sinica, 2000, 49(3): 497-501.doi:10.7498/aps.49.497
[18]	WANG WEN-ZHONG, ZHANG TAN-XIN, HE ZHAO-TANG, GU YU-QIU, LONG YONG-LU, JIANG WEN-MIAN.DIAGNOSTICS OF ELECTRON DENSITY OF LASER-PRODU-CED PLASMA FROM THE XUV SPECTRA OF AgXIX. Acta Physica Sinica, 1995, 44(11): 1783-1787.doi:10.7498/aps.44.1783
[19]	GUAN WEI-SHU, WANG EN-YAO, CHENG SHI-QING, DUAN SHU-YUN, WANG JI-HAI, GU BIAO, SHANG ZHEN-KUI.EXPERIMENTAL INVESTIGATION ON PROPERTIES OF E. C. H. PLASMA AND HOT ELECTRON RING. Acta Physica Sinica, 1989, 38(2): 228-235.doi:10.7498/aps.38.228
[20]	CHEN YAN-PING, ZHOU YU-MEI.ECRH IN NON-THERMAL EQUILIBRIUM PLASMAS IN WEAKLY RELATIVISTIC REGIME. Acta Physica Sinica, 1984, 33(7): 1050-1057.doi:10.7498/aps.33.1050

Catalog

Vol. 70, Issue 9 - 2021-05-05

Metrics

Abstract views:8072
PDF Downloads:319
Cited By:0

Search

Article