\begin{document}$\sqrt{ {N}}$\end{document} times, or the flux noise of SSA is reduced by 1/\begin{document}$\sqrt{ {N}}$\end{document} times compared with that of an element-SQUID ideally. However, with the increase in the number of element-SQUIDs in series, the chip design of SSA becomes more complicated, which puts forward higher requirements for the consistency and stability of its fabrication process. Besides, there exists a certain flux coherence between element-SQUIDs in SSA, whose normal operation depends on the working state of each element-SQUID in the array. In this paper, the fabrication of series SQUID array is carried on the autonomous superconducting micro-nano process platform, with a yield rate reaching over 80% on a 4-inch standard silicon wafer. Two kinds of SSAs with 200 and 800 element-SQUIDs, respectively, are integrated in a meandering way on a chip in a millimeter area. Home-made directly-coupled readout circuit is used to obtain the characteristics of SSA. The experimental results reveal that the flux noise at best working point is as low as 0.5μ\begin{document}$\varPhi _{\text{0}}/\sqrt{\text{Hz}}$\end{document} and the current sensitivity is about 35 μA/Φ0, thus, the equivalent input current noise is achieved at a level of 18 pA/\begin{document}$ \sqrt{\text{Hz}} $\end{document}. Additionally, the dependence of relevant parameters in array on the number of element-SQUIDs is verified, which is consistent with theoretical expectation basically. These show that the reliability of device design and the consistency of fabrication process perform well, thus laying the technical foundation for developing the low-noise SQUID amplifier and the multiplexed readout of low-impedance detectors."> - 必威体育下载

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    Liang Tian-Tian, Zhang Guo-Feng, Wu Wen-Tao, Ni Zhi, Wang Yong-Liang, Ying Li-Liang, Wu Jun, Rong Liang-Liang, Peng Wei, Gao Bo
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    • Abstract views:4065
    • PDF Downloads:95
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    Publishing process
    • Received Date:10 March 2021
    • Accepted Date:20 April 2021
    • Available Online:07 June 2021
    • Published Online:05 September 2021

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