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Abstract

Optical emission spectroscopy (OES) has been widely applied to plasma etching, material processing, development of plasma equipment and technology, as well as plasma propulsion. The collisional-radiative model used in OES is affected by the deviation of fundamental data such as collision cross sections, thus leading to the error in diagnostic results. In this work, a novel method is developed based on feedforward neural network for OES. By comparing the error characteristics of the new method with those of the traditional least-square diagnostic method, it is found that the neural network diagnosis method can reduce the transmission of basic data deviation to the diagnosis results by identifying the characteristics of the spectral vector. This is confirmed by the experimental results. Finally, the mechanism of the neural network algorithm against fundamental data deviation is analyzed. This method also has a good application prospect in plasma parameter online monitoring, imaging monitoring and mass data processing.

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Authors and contacts

Corresponding author:Zhu Xi-Ming,zhuximing@hit.edu.cn; Ning Zhong-Xi,ningzx@hit.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 11775063), the Defense Industrial Technology Development Program, China (Grant No. JCKY2018203B029), and the Defense Industrial Metering Program, China (Grant No. JSJL2016203B017)

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[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]
[35]
[36]
[37]
[38]
[39]
[40]

Cited By

DownLoad: Full-Size Img PowerPoint

序号	波长/nm	上能级	序号	波长/nm	上能级
1	460.303	5p⁴(³P₂)6p $ {}^{2}{\left[1\right]}_{3/2}^\circ $	9	834.745	5p⁵($ {}^{2}{\mathrm{P}}_{1/2}^\circ $)6p²[3/2]₂
2	484.433	5p⁴(³P₂)6p $ {}^{2}{\left[3\right]}_{7/2}^\circ $	10	840.919	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[3/2]₁
3	492.148	5p⁴(³P₁)6p $ {}^{2}{\left[2\right]}_{5/2}^\circ $	11	881.941	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[5/2]₃
4	529.222	5p⁴(³P²)6p $ {}^{2}{\left[2\right]}_{5/2}^\circ $	12	895.225	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[3/2]₂
5	541.915	5p⁴(³P₂)6p $ {}^{2}{\left[3\right]}_{5/2}^\circ $	13	904.545	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[5/2]₂
6	788.739	5p⁵(²P°_1/2)6p²[1/2]₀	14	916.265	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[3/2]₁
7	823.163	5p⁵(²P°_3/2)6p²[3/2]₂	15	979.970	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[1/2]₁
8	828.012	5p⁵(²P°_3/2)6p²[1/2]₀	16	992.320	5p⁵($ {}^{2}{\mathrm{P}}_{3/2}^\circ $)6p²[5/2]₂

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[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
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Vol. 70, Issue 9 - 2021-05-05

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