- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

Abstract

With the shrinkage of chip feature sizes, porous materials are widely used in microelectronics. However, they are facing severe challenges in plasma etching, as the reactive radicals can diffuse into the interior of material and damage the material, which is called plasma induced damage. In this paper, we review two kinds of etching processes based on low chuck temperature, i.e. cryogenic etching. By lowering the chuck temperature, either the etching by-products or the precursor gas can condense in the porous material, and thus preventing the radicals from diffusing and protect the material from being damaged by plasma. The technology of cryogenic filling inside the porous material is simple but effective, which allows it to have a good application prospect.

Keywords:

Authors and contacts

Corresponding author:Wang You-Nian,ynwang@dlut.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant Nos. 11675036, 11935005) and the Scientific Research Foundation from Dalian University of Technology, China (Grant No. DUT19RC(3)045)

FullText HTML: translate this paragraph

References

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]

Cited By

DownLoad: Full-Size Img PowerPoint

	优点	缺点
傅里叶变换红外光谱	通过吸收峰变化, 可表征材料化学结构变化	对操作环境较敏感, 要避免材料二次污染的影响
光谱椭偏仪测量	通过反射率变化, 可间接推测介电常数等变化	需要额外数据处理
dHF酸浸泡法	操作简单, 易观测损伤	使用化学试剂, 腐蚀损伤材料

DownLoad: CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]

[1]	Chen Yi-Cheng, Zhang Cheng-Long, Zhang Li-Chao, Qi Zhi-Mei.A sensing method based on InSb grating coupled terahertz surface plasmon polariton resonance. Acta Physica Sinica, 2024, 73(9): 098701.doi:10.7498/aps.73.20231904
[2]	Fang Ze, Pan Yong-Quan, Dai Dong, Zhang Jun-Bo.Physics-informed neural networks based on source term decoupled and its application in discharge plasma simulation. Acta Physica Sinica, 2024, 73(14): 145201.doi:10.7498/aps.73.20240343
[3]	Chen Jin-Feng, Zhu Lin-Fan.Electron collision cross section data in plasma etching modeling. Acta Physica Sinica, 2024, 73(9): 095201.doi:10.7498/aps.73.20231598
[4]	Chen Jun-Xiang, Yu Ji-Dong, Geng Hua-Yun, He Hong-Liang.Temperature and pressure calculation of porous materials. Acta Physica Sinica, 2017, 66(5): 056401.doi:10.7498/aps.66.056401
[5]	Sun An-Bang, Li Han-Wei, Xu Peng, Zhang Guan-Jun.Monte Carlo simulations of electron transport coefficients in low temperature streamer discharge plasmas. Acta Physica Sinica, 2017, 66(19): 195101.doi:10.7498/aps.66.195101
[6]	Wang Xue-Yang, Qi Zhi-Hua, Song Ying, Liu Dong-Ping.Bacteria sterilization application by using plasma activated physiological saline. Acta Physica Sinica, 2016, 65(12): 123301.doi:10.7498/aps.65.123301
[7]	Yang Shu-Min, Han Wei, Gu Jian-Jun, Li Hai-Tao, Qi Yun-Kai.Preparation and study of anodic alumina thin films with rainbow rings. Acta Physica Sinica, 2015, 64(7): 076102.doi:10.7498/aps.64.076102
[8]	He Man-Li, Wang Xiao, Zhang Ming, Wang Li, Song Rui.Vibrational distribution of H2 (D2 and T2) molecules in low temperature plasma. Acta Physica Sinica, 2014, 63(12): 125201.doi:10.7498/aps.63.125201
[9]	Zhang Zeng-Hui, Zhang Guan-Jun, Shao Xian-Jun, Chang Zheng-Shi, Peng Zhao-Yu, Xu Hao.Modelling study of dielectric barrier glow discharge in Ar/NH3 mixture at atmospheric pressure. Acta Physica Sinica, 2012, 61(24): 245205.doi:10.7498/aps.61.245205
[10]	Zhang Zeng-Hui, Shao Xian-Jun, Zhang Guan-Jun, Li Ya-Xi, Peng Zhao-Yu.One-dimensional simulation of dielectric barrier glow discharge in atmospheric pressure Ar. Acta Physica Sinica, 2012, 61(4): 045205.doi:10.7498/aps.61.045205
[11]	Wang Yu, Li Xiao-Dong, Yu Liang, Yan Jian-Hua.Numerical simulation study on characteristics of gliding arc discharge. Acta Physica Sinica, 2011, 60(3): 035203.doi:10.7498/aps.60.035203
[12]	Shao Xian-Jun, Ma Yue, Li Ya-Xi, Zhang Guan-Jun.One-dimensional simulation of low pressure xenon dielectric barrier discharge. Acta Physica Sinica, 2010, 59(12): 8747-8754.doi:10.7498/aps.59.8747
[13]	Liu Pei-Sheng.Analysis of shearing failure mode for porous materials under compression. Acta Physica Sinica, 2010, 59(7): 4849-4856.doi:10.7498/aps.59.4849
[14]	Liu Pei-Sheng.Analyses of buckling failure mode for porous materials under compression. Acta Physica Sinica, 2010, 59(12): 8801-8806.doi:10.7498/aps.59.8801
[15]	Niu Tian-Ye, Cao Jin-Xiang, Liu Lei, Liu Jin-Ying, Wang Yan, Wang Liang, Lü You, Wang Ge, Zhu Ying.The techniques of single probe and emission spectroscopy diagnostics in low temperature argon plasmas. Acta Physica Sinica, 2007, 56(4): 2330-2336.doi:10.7498/aps.56.2330
[16]	Zhu Xi-Rui, Meng Xu-Jun, Tian Ming-Feng, Jiang Min-Hao.Calculation of atomic energy using partial-wave method for plasmas at medium-low temperature. Acta Physica Sinica, 2007, 56(4): 2053-2060.doi:10.7498/aps.56.2053
[17]	Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, Gong Xiang-Dong.Simulation of step response of silane low-temperature pasma(1). Acta Physica Sinica, 2005, 54(7): 3251-3256.doi:10.7498/aps.54.3251
[18]	LIU HONG-XIANG, WEI HE-LIN, LIU ZU-LI, LIU YAN-HONG, WANG JUN-ZHEN.EFFECT OF THE MAGNETIC MIRROR FIELD ON THE ION ENERGY DISTRIBUTIONS IN A RADIO F REQUENCY PLASMA. Acta Physica Sinica, 2000, 49(9): 1764-1768.doi:10.7498/aps.49.1764
[19]	WU NAI-JUAN, XIE KAN, HU JIAN-FANG, HONG MING-YUAN, LI HUI-NAN.XPS STUDY OF SURFACE NITROGEN ON PET ACTED BY LOW TEMPERATURE PLASMA AND LOW ENERGY IONS. Acta Physica Sinica, 1988, 37(3): 373-378.doi:10.7498/aps.37.373
[20]	LI JIA-QUAN.LOW TEMPERATURE PLASMA IN A MAGNETIC WELL. Acta Physica Sinica, 1980, 29(11): 1471-1478.doi:10.7498/aps.29.1471

Catalog

Vol. 70, Issue 9 - 2021-05-05

Metrics

Abstract views:7791
PDF Downloads:196
Cited By:0

Search

Article