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Abstract

Moiré patterns formed by overlapping two circular gratings of slightly different pitches have been extensively used for measuring the two-dimensional (2D) and three-dimensional (3D) displacements. However, in the existing applications, Moiré patterns are analyzed based on geometric superposition, by which the 3D displacements cannot be instantaneously or simultaneously measured with a high accuracy. In this paper, radial shearing interferometry with double circular gratings of slightly different pitches is presented to realize the simultaneous measurement of 3D displacements. The measurement is based on the principle that Moiré patterns produced by radial shearing interferometry are determined not only by the 2D in-plane displacements, but also by the out-of-plane displacement that brings about a phase shift between Moiré patterns of +1 and –1 diffraction orders. First, the production mechanism of Moiré patterns by radial shearing interferometry is studied based on the scalar diffraction theory and the intensity distribution of Moiré fringes of +1 and –1 orders is derived to establish the exact analytic relations between Moiré patterns and 3D displacements. Second, on the basis of spectrum characteristics of circular grating, a semicircular ring filter is proposed for spatial filtering to realize the simultaneous imaging of Moiré fringes of +1 and –1 orders. Then, the algorithm to quantitatively extract 3D displacements from Moiré patterns is proposed and demonstrated by numerical simulation. In the algorithm, Moiré patterns in the rectangular coordinate system are transformed into the polar coordinate system and skeletons are extracted to determine the feature points of the bright fringes. The in-plane displacements can be solved by feature points of +1 or –1 diffraction order, and the out-of-plane displacement can be computed by the feature points of +1 and –1 diffraction orders in the same bright fringe. Finally, experimental results prove that the maximum absolute error and mean error for in-plane displacements are 4.8 × 10 ^–3mm and 2.0 × 10 ^–4mm respectively, and 0.25 mm and 8.6 × 10 ^–3mm for out-of-plane displacement. In conclusion, by using the Moiré patterns of +1 and –1 diffraction orders imaged by radial shearing interferometer with double circular gratings of slightly different pitches, the 3D displacement can be simultaneously measured. The method has the advantages of simple device, high measurement accuracy, non-contact and instantaneous measurement, which provides an important guidance for practically measuring the 3D displacements.

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Corresponding author:Wu Shen-Jiang,bxait@xatu.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 61701385), the Foundation of Equipment Pre-research Area of China (Grant No. 61406190121), and Pre-research Foundation of key laboratory (Grant No. 6142602200407)

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Input/mm			Measured/mm			Absolute error/mm
Δ_x	Δ_y	Δ_z	Δ_x	Δ_y	Δ_z	Δ_x	Δ_y	Δ_z
0.00	0.15	7.90	–0.0030	0.1458	7.6978	0.0030	0.0042	0.2022
0.05	0.15	7.90	0.0488	0.1519	7.9868	0.0012	–0.0019	–0.0868
0.10	0.15	7.90	0.0980	0.1487	7.8158	0.0020	0.0013	0.0842
0.15	0.15	7.90	0.1512	0.1548	8.1415	–0.0012	–0.0048	–0.2415
0.20	0.15	7.90	0.2002	0.1458	7.6720	–0.0002	0.0042	0.2280
0.25	0.15	7.90	0.2496	0.1494	7.8628	0.0004	0.0006	0.0372
0.30	0.15	7.90	0.3014	0.1482	7.8078	–0.0014	0.0018	0.0922
0.35	0.15	7.90	0.3516	0.1544	8.1468	–0.0016	–0.0044	–0.2468
Mean error						0.0003	0.0001	0.0086

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Vol. 70, Issue 7 - 2021-04-05

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