Application of Ge50Te50/Zn15Sb85 nanocomposite multilayer films in high thermal stability and low power phase change memory

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Abstract

The Ge ₅₀Te ₅₀/Zn ₁₅Sb ₈₅nanocomposite multilayer films are prepared by the magnetron sputtering. The variation of resistance with temperature and with crystallization activation energy is studied. The multilayer structure of the section before and after the crystallization for Ge ₅₀Te ₅₀/Zn ₁₅Sb ₈₅nanocomposite multilayer film is compared by transmission electron microscope. The phase change memory device based on [GT(7nm)/ZS(3nm)] ₅is manufactured, and the electrical performance is measured. The fast switching speed, low operating power consumption, and good cycling performance are achieved for Ge ₅₀Te ₅₀/Zn ₁₅Sb ₈₅. Ge ₅₀Te ₅₀/Zn ₁₅Sb ₈₅, which is a kind of nanocomposite multilayer film, a promising phase change storage material with high thermal stability and low power consumption.

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Corresponding author:Hu Yi-Feng,hyf@jsut.edu.cn

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Vol. 69, Issue 14 - 2020-07-20

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