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As a novel hybrid quantum system, cavity optomechanical system shows super strong coupling strength, extremely low noise level and considerable coherent time under superconducting condition. In this paper, we briefly introduce basic principles of cavity optomechanics and cavity optomechanical systems. Meanwhile, we also classify the widely studied cavity optomechanical systems as five categories in their materials and structures. Significant parameters of these optomechanical systems, such as quality factor, mass and vibrating frequency of mechanical oscillator, are listed in detail. Technical merits and defects of these optomechanical systems are summarized. Furthermore, we introduce the research progress of non-classical microwave quantum states preparation by utilizing generalized cavity optomechanical systems, and we also analyze the performance advancements and remaining problems of this preparation method. In the end, we summarize the application cases at present and look forward to the potential application scenarios in the future. Our summary may be helpful for researchers who are focusing on quantum applications in sensing, radar, navigation, and communication in microwave domain.
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Keywords:
- cavityoptomechanical system/
- non-classical microwave quantum states/
- microwave-optical entanglement/
- electro-opto-mechanical converter
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类别 品质因数水平 振子质量水平 振子频率水平 优势 不足 法布里-珀罗腔 104 kg—pg kHz—MHz 技术成熟, 应用广泛 品质因数水平较低, 耗散较大、不易集成 回音壁腔 109(微球腔)
108(微环腔)ng—fg MHz—GHz 光力耦合度高, 构造灵活,
腔内光子寿命长工艺要求高、成本高 振动薄膜腔 105 pg MHz 结构简单、灵活 耗散较大、不易集成 光子晶体腔 106 fg GHz 可利用自由度多, 片上可扩展
性好, 精确的模式控制工艺复杂 超导微波腔 107 pg MHz 可高度集成, 与超导器件兼容,
腔的稳定性好, 热噪声水平低超低温, 电磁噪声谱较宽 
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腔光力系统类型 作用类型 模式数 腔类型 制备的微波非经典量子态 腔电力系统 光子-声子 2 微波腔 连续变量微波纠缠态, 微波压缩态, 微波-机械
振子谐振模纠缠态腔电光力系统 光子-声子-光子 3 微波腔, 光腔 连续、离散变量微波纠缠态, 微波单光子Fock态,
微波-机械振子谐振模纠缠态, 微波-光纠缠态DownLoad:
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