Polarization is a property of vector beam that is widely used in many areas of science and technology. And vector beam is also called polarization vortex beam. Radially polarized beam and azimuthally polarized beam are the paradigm of vector beam. Extreme ultraviolet (EUV) vector beam could be applied in many fields such as diffractive imaging, Extreme Ultraviolet Lithography (EUVL), or ultrafast control of magnetic properties. In our experiments, a home-made EUV spectrometer was used to generate a tunable ultrafast EUV coherent light source based on high-order harmonic generation (HHG) by intense femtosecond laser. The apparatus features by using the plane grating in conical diffraction. The radially polarized vector beam and Gaussian beam with 800 nm, 35 fs laser pulses were applied to interact with Argon atoms, respectively. The high harmonic spectrums with a polarization singularity and a Gaussian distribution were observed. The experimental results demonstrate that the EUV vector beam could be transfered from near-infrared driven laser during the highly nonlinear interaction. The short-wavelength radiation with a polarization singularity can reach a photon flux of 10 ⁸per second. And the harmonic orders produced by Gaussian beam are significantly higher than that of vector field. The mechanism of macroscopic phase matching was discussed. It indicates that the phase matching for vector harmonic yields is similar with that driven by a Gaussian beam. In this case, EUV vector beam through HHG has been obtained, which provides one important method for attosecond vector pulses and opens new possibilities for exploring and manipulating the time-dependent evolution of quantum states in atom and molecule.