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Abstract

Femtosecond laser ablation possesses a variety of applications due to its better control, high power density, smaller heat-affected zone, minimal collateral material damage, lower ablation thresholds, and excellent mechanical properties. The non-Fourier effect in heat conduction becomes significant when the heating time becomes extremely small. In order to analyze the femtosecond laser ablation process, a hyperbolic heat conduction model is established based on the dual-phase-lag model. Taken into account in the model are the effect of heat source, laser heating of the target, the evaporation and phase explosion of the target material, the formation and expansion of the plasma plume, and interaction of the plasma plume with the incoming laser. Temperature-dependent optical and thermophysical properties are also considered in the model due to the fact that the properties of the target will change over a wide range in the femtosecond laser ablation process. The effects of the plasma shielding, the ratio of the two delay times, and laser fluence are discussed and the effectiveness of the model is verified by comparing the simulation results with the experimental results. The results show that the plasma shielding has a great influence on the femtosecond laser ablation process, especially when the laser fluence is high. The ratio between the two delay times (the ratio B) has a great influence on the temperature characteristic and ablation characteristic in the femtosecond laser ablation process. The augment of the ratio Bwill increase the degree of thermal diffusion, which will lower down the surface temperature and accelerate the ablation rate after the ablation has begun. The ablation mechanism of femtosecond laser ablation is dominated by phase explosion. The heat affected zone of femtosecond laser ablation is small, and the heat affected zone is less affected by laser fluence. The comparison between the simulation results and the experimental results in the literature shows that the model based on the dual-phase-lag model can effectively simulate the femtosecond laser ablation process.

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Authors and contacts

Corresponding author:Tan Sheng,tsh201201401007@163.com

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 11772354).

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参数	符号	取值	文献
熔点/K	${T_{\rm{m}}}$	1357.77	[83]
沸点/K	${T_{\rm{b}}}$	2835.15	[83]
蒸发潜热/J·kg^–1	${L_{{\rm{hv}}}}$	4.79937 × 10⁶	[83]
第一电离能/eV	$I{P_1}$	7.72638	[83]
临界温度/K	${T_{{\rm{cr}}}}$	8500.00	[81]
蒸发系数	${C_{\rm{s}}}$	0.82	[85]
热流矢量延迟时间/ps	${\tau _q}$	0.56—5.4	[66]
温度梯度延迟时间/ps	${\tau _{\rm{T}}}$	6.0—63.0	[66]

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Vol. 68, Issue 5 - 2019-03-05

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