[1] |
Yang Zhen-Yu, Zhang Yuan-Zhe, Fan Wei, Yang Guang-Jie, Han Xian-Wei.Fluid simulation for detachment process in magnetic nozzle of magnetoplasma rocket engine. Acta Physica Sinica, 2024, 73(10): 105201.doi:10.7498/aps.73.20231862 |
[2] |
Duan Meng-Yue, Jia Wen-Zhu, Zhang Ying-Ying, Zhang Yi-Fan, Song Yuan-Hong.Two-dimensional fluid simulation of spatial distribution of dust particles in a capacitively coupled silane plasma. Acta Physica Sinica, 2023, 72(16): 165202.doi:10.7498/aps.72.20230686 |
[3] |
Chen Long, Wang Di-Ya, Chen Jun-Yu, Duan Ping, Yang Ye-Hui, Tan Cong-Qi.Characteristics and suppression methods of low-frequency oscillation in Hall thruster. Acta Physica Sinica, 2023, 72(17): 175201.doi:10.7498/aps.72.20230680 |
[4] |
Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong.Numerical investigation of SiO2film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica, 2022, 71(17): 170201.doi:10.7498/aps.71.20220493 |
[5] |
Huang Hua, Li Jiang-Tao, Wang Qian-Nan, Meng Ling-Biao, Qi Wei, Hong Wei, Zhang Zhi-Meng, Zhang Bo, He Shu-Kai, Cui Bo, Wu Yi-Tong, Zhang Hang, Ji Liang-Liang, Zhou Wei-Min, Hu Jian-Bo.Experimental study on the dynamic compression of materials at XGIII facility by laser proton photography. Acta Physica Sinica, 2022, 71(19): 195202.doi:10.7498/aps.71.20220919 |
[6] |
Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Lu Man-Ting, Xin Yu.Axial diagnosis of radio-frequency capacitively coupled Ar/O2plasma. Acta Physica Sinica, 2021, 70(11): 115204.doi:10.7498/aps.70.20202113 |
[7] |
Wang Li, Wen De-Qi, Tian Chong-Biao, Song Yuan-Hong, Wang You-Nian.Electron heating dynamics and plasma parameters control in capacitively coupled plasma. Acta Physica Sinica, 2021, 70(9): 095214.doi:10.7498/aps.70.20210473 |
[8] |
Dong Wan, Xu Hai-Wen, Dai Zhong-Ling, Song Yuan-Hong, Wang You-Nian.Gap length effect on discharge mode and etching profiles in asymmetric dual frequency capacitive CF4/Ar discharges. Acta Physica Sinica, 2021, 70(9): 095213.doi:10.7498/aps.70.20210546 |
[9] |
Zhou Yu, Cao Li-Yang, Ma Xiao-Ping, Deng Li-Li, Xin Yu.Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe. Acta Physica Sinica, 2020, 69(8): 085201.doi:10.7498/aps.69.20191864 |
[10] |
Gao Shu-Han, Wang Xu-Cheng, Zhang Yuan-Tao.Numerical study on discharge characteristics in ultra-high frequency band modulated by pulses with electrodes covered by barriers. Acta Physica Sinica, 2020, 69(11): 115204.doi:10.7498/aps.69.20191853 |
[11] |
Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu.Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency. Acta Physica Sinica, 2017, 66(18): 185202.doi:10.7498/aps.66.185202 |
[12] |
Yang Zheng-Quan, Li Cheng, Lei Yi-An.Magnetohydrodynamic simulation of conical plasma compression. Acta Physica Sinica, 2016, 65(20): 205201.doi:10.7498/aps.65.205201 |
[13] |
Wang Jun, Wang Tao, Tang Cheng-Shuang, Xin Yu.Evolution of electron energy distribution function in capacitively coupled argon plasma driven by very high frequency. Acta Physica Sinica, 2016, 65(5): 055203.doi:10.7498/aps.65.055203 |
[14] |
Hao Ying-Ying, Meng Xiu-Lan, Yao Fu-Bao, Zhao Guo-Ming, Wang Jing, Zhang Lian-Zhu.Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model. Acta Physica Sinica, 2014, 63(18): 185205.doi:10.7498/aps.63.185205 |
[15] |
Du Yong-Quan, Liu Wen-Yao, Zhu Ai-Min, Li Xiao-Song, Zhao Tian-Liang, Liu Yong-Xin, Gao Fei, Xu Yong, Wang You-Nian.Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2013, 62(20): 205208.doi:10.7498/aps.62.205208 |
[16] |
Hong Bu-Shuang, Yuan Tao, Zou Shuai, Tang Zhong-Hua, Xu Dong-Sheng, Yu Yi-Qing, Wang Xu-Sheng, Xin Yu.Influence of addifion of electronegative gases on the properties of capacitively coupled Ar plasmas. Acta Physica Sinica, 2013, 62(11): 115202.doi:10.7498/aps.62.115202 |
[17] |
Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu.Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma. Acta Physica Sinica, 2012, 61(7): 075204.doi:10.7498/aps.61.075204 |
[18] |
Jiang Xiang-Zhan, Liu Yong-Xin, Bi Zhen-Hua, Lu Wen-Qi, Wang You-Nian.Radial density uniformity of dual frequency capacitively coupled plasma. Acta Physica Sinica, 2012, 61(1): 015204.doi:10.7498/aps.61.015204 |
[19] |
Yuan Qiang-Hua, Xin Yu, Huang Xiao-Jiang, Sun Kai, Ning Zhao-Yuan.Effect of 13.56MHz low-frequency power on electrical characteristic of 60MHz radio-frequency capacitively coupled plasma. Acta Physica Sinica, 2008, 57(11): 7038-7043.doi:10.7498/aps.57.7038 |
[20] |
Song Fa-Lun, Cao Jin-Xiang, Wang Ge.The attenuation of electromagnetic waves by inhomogeneous spherically symmetric plasma. Acta Physica Sinica, 2004, 53(4): 1110-1115.doi:10.7498/aps.53.1110 |