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锡(Sn)是13.5 nm光刻光源的材料, Sn等离子体辐射性质对光源设计意义重大. 基于细致能级模型, 在局域热平衡假设条件下计算得到了Sn等离子体辐射不透明度和发射谱. 使用多组态Dirac-Fock方法获得了
${\rm{Sn}}^{6+}\text{-}{\rm{Sn}}^{14+}$ 离子的能级和辐射跃迁振子强度等基本原子参数. 针对波长在13.5 nm附近的4d-4f和4p-4d跃迁系, 重点考虑了4d m-4f m( m= 1, 2, 3, 4)和4p n-4d n( n= 1, 2, 3)的电子关联效应. 在大规模组态相互作用计算中, 每种电荷态离子的精细能级数目约为20万. 对较强的吸收谱线(振子强度大于0.01), 其长度和速度表示的相对差异为20%—30%. 基于精密原子参数, 计算了Sn等离子体在30 eV, 0.01 g/cm 3条件下的透射谱, 与实验结果基本符合. 系统计算了温度16—30 eV, 密度0.0001—0.1 g/cm 3条件下的Sn等离子体辐射不透明度和发射光谱, 分析了极紫外(extreme ultraviolet, EUV)光谱随温度和密度的变化规律. 研究表明温度一定时, 密度增大会使得13.5 nm附近的辐射不透明度和发射谱包络增宽. 而密度一定时, 随着温度的增加, 辐射不透明度和发射谱在13.5 nm附近存在明显的窄化效应. 本文工作有助于EUV光刻光源的设计和研究.Sn is the material for an extreme ultraviolet (EUV) light source working at 13.5 nm, therefore the radiative properties of Sn plasma are of great importance in designing light source. The radiative opacity and emissivity of Sn plasma at local thermodynamic equilibrium are investigated by using a detailed-level-accounting model. In order to obtain precise atomic data, a multi-configuration Dirac-Fock method is used to calculate energy levels and oscillator strengths of${\rm{Sn}}^{6+}$ -${\rm{Sn}}^{14+}$ . The electronic correlation effects of$4{\rm d}^m\text{-}4{\rm f}^m$ ($m=1, 2, 3, 4$ ) and$ 4\mathrm{p}^n\text{-}4\mathrm{d}^n $ ($n=1, 2, 3$ ) are mainly considered, which dominate the radiation near 13.5 nm. The number of fine-structure levels reaches about 200000 for each ionization stage in the present large-scale configuration interaction calculations. For the large oscillator strengths (> 0.01), the length form is in accord with the velocity form and their relative difference is about 20%–30%. The calculated transmission spectra of Sn plasma at 30 eV and 0.01 g/cm 3are compared with the experimental result, respectively, showing that they have both good consistency. The radiative opacity and emissivity of Sn plasma at the temperature in a range of 16–30 eV and density in a scope of of 0.0001–0.1 g/cm 3are investigated systematically. The effects of the plasma temperature and plasma density on radiation characteristics are studied. The results show that the radiative properties near 13.5 nm are broadened with the increase of density at a specific temperature, while it is narrowed with the increase of temperature for a specific density. The present investigation should be helpful in designing and studying EUV light source in the future.-
Keywords:
- extreme ultraviolet light source/
- detailed-level-accounting model/
- configuration interaction
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能级 J 本文(MCDF) 实验[14] CI+MBPT[14] 1 ${\rm{4d}}_{3/2}^4$ 0 0.00 0.00 0.00 2 $(\text{4d}_{3/2}^3)_{3/2}\text{4d}_{5/2}$ 1 0.36 0.38 0.39 3 $(\text{4d}_{3/2}^2)_{2}(\text{4d}_{5/2}^2)_4$ 2 0.79 0.82 0.83 4 $(\text{4d}_{3/2}^2)_{2}(\text{4d}_{5/2}^2)_4$ 3 1.22 1.25 1.27 5 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{9/2}$ 4 1.64 1.65 1.68 6 $(\text{4d}_{3/2}^2)_{2}(\text{4d}_{5/2}^2)_2$ 0 3.48 3.32 3.28 7 $(\text{4d}_{3/2}^3)_{3/2}\text{4d}_{5/2}$ 4 3.98 3.67 3.60 8 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_2$ 3 4.58 4.33 4.29 9 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{9/2}$ 5 4.61 4.36 4.30 10 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_2$ 1 4.68 4.39 4.39 11 $(\text{4d}_{3/2}^3)_{3/2}\text{4d}_{5/2}$ 2 4.80 4.55 4.54 12 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_4$ 6 5.09 4.74 4.67 13 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{9/2}$ 4 5.29 5.02 4.99 14 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_2$ 2 5.61 5.38 5.40 15 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_2$ 4 5.72 5.43 5.40 16 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{3/2}$ 3 5.87 5.60 5.60 17 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_2$ 3 6.27 5.99 5.99 18 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_4$ 5 6.36 6.06 6.03 19 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{3/2}$ 2 6.69 6.42 6.43 20 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{3/2}$ 1 6.81 6.55 6.56 21 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{9/2}$ 6 7.15 6.68 6.60 22 $\text{4d}_{5/2}^4$ 4 7.72 7.40 7.38 23 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{3/2}$ 0 7.77 7.55 7.57 24 $\text{4d}_{5/2}^4$ 2 8.41 8.01 8.00 25 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{3/2}$ 3 8.89 8.43 8.42 26 $(\text{4d}_{3/2}^2)_0(\text{4d}_{5/2}^2)_2$ 2 9.86 — 9.40 27 $(\text{4d}_{3/2}^2)_0(\text{4d}_{5/2}^2)_4$ 4 10.27 9.77 9.78 28 $(\text{4d}_{3/2}^2)_2(\text{4d}_{5/2}^2)_0$ 2 10.48 9.97 9.98 29 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{5/2}$ 3 10.66 10.15 10.16 30 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{5/2}$ 1 10.77 — 10.30 31 $\text{4d}_{5/2}^4$ 0 11.23 — 10.77 32 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{5/2}$ 4 11.79 — 11.11 33 $\text{4d}_{3/2}(\text{4d}_{5/2}^3)_{5/2}$ 2 14.70 — 13.95 34 $(\text{4d}_{3/2}^2)_0(\text{4d}_{5/2}^2)_0$ 0 18.87 — 17.98 $T_{\rm{e}}$/eV ρ/(g·cm–3) $j_{{\rm{tot}}}$/(W·cm–3) 20 0.0001 4.52(10) 0.001 7.86(11) 0.01 6.68(12) 0.1 8.36(13) 23 0.0001 5.50(10) 0.001 1.01(12) 0.01 1.42(13) 0.1 1.69(14) 27 0.001 1.13(12) 0.005 9.07(12) 0.01 2.24(13) 0.1 3.11(14) -
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