- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

摘要

鉴于紫外探测器在诸多领域的重要应用, 探寻自供电型探测器以及挖掘其内在运行机理显得尤为关键. 本文制备的Ga ₂O ₃/Al _0.1Ga _0.9N异质结紫外探测器能够实现对254 nm波长(UVC波段)和365 nm(UVA波段)波长紫外光的敏感探测, 并在不同方向的偏压驱动下能够实现耗尽模式和光电导模式的光探测. 这里介绍的基于Ga ₂O ₃/Al _0.1Ga _0.9N异质结的双波段、双模式紫外光电探测器具有理想的暗电流和光响应特性; 在5和–5 V偏压下, 在254 nm光照射下的光响应度分别为2.09和66.32 mA/W, 在365 nm光照射下的光响应度分别为0.22和34.75 mA/W. 并且仅在内建电场的作用下能够自供电运行, 对254和365 nm波长紫外光的光响应度为0.13和0.01 mA/W. 进一步, 除对材料与器件性能的表征与解析, 本文还从异质结探测器的运行机理上分析了其双波段与双模式探测特性.

关键词:

Abstract

The deep-ultraviolet (DUV) photodetectors (PDs) have important applications in lots of fields. Thus, developing self-powered DUV PDs and excavating the inherent mechanism seem seriously crucial to achieving further actual applications. The construction of heterojunction can lead to many desired characteristics in optoelectronic devices. In the field of DUV photodetection, Ga ₂O ₃has been a popular subject for constructing DUV PDs. So, it is necessary to develop self-powered Ga ₂O ₃-based DUV PDs through fabricating its heterogeneous structure. Therefore, in this work, the Ga ₂O ₃/Al _0.1Ga _0.9N heterojunction DUV PD is fabricated and discussed, which can achieve 254 and 365 nm DUV light photodetection. At positive voltages and negative voltages, the heterojunction PD can operate in a photoconductive mode or a depletion mode, respectively. In view of the PD performance, it displays decent dark current and DUV photoresponses. At voltage of 5 and –5 V, under 254 nm DUV light illumination, the photoresponsivity ( R) is 2.09 and 66.32 mA/W, respectively, while under 365 nm DUV light illumination, Ris 0.22 and 34.75 mA/W, respectively. In addition, under the built-in electric field ( E _built-in), Ris 0.13 and 0.01 mA/W for 254 nm and 365 nm DUV light illumination, respectively. In all, the fabricated heterojunction PD displays promising prospects in the coming next-generation semiconductor photodetection technology. The results in this work indicate the potential of Ga ₂O ₃/Al _0.1Ga _0.9N heterojunction with high performance DUV photodetection. Furthermore, except for the characterizations of the materials and photodetector, in the end of this paper, the operating mechanism of the dual-band dual-mode heterojunction PD is analyzed through its heterogeneous energy-band diagram. It is concluded that the illustrated dual-band dual-mode Ga ₂O ₃/Al _0.1Ga _0.9N heterojunction can be sensitive to UVA waveband and UVC waveband in the electromagnetic spectrum, extending its photodetection region. And, the dual-mode (photoconductive mode and depletion mode) photodetection indicates two kinds of carrier transports in one PD, which can be attributed to the successful construction of the N-N tomo-type Ga ₂O ₃/Al _0.1Ga _0.9N heterojunction.

Keywords:

作者及机构信息

1.
2.
3.
4.
5.

通信作者:刘增,zengliu@njupt.edu.cn; 张少辉,shzhang2016@sinano.ac.cn; 唐为华,whtang@njupt.edu.cn

基金项目:国家自然科学基金青年科学基金(批准号: 62204125)、南京邮电大学引进人才科研启动基金 (自然科学)(批准号: XK1060921115, XK1060921002)、山西省基础研究计划(批准号:20210302123388)和山西省高等学校科技创新项目(批准号: 2021L588)资助的课题

Authors and contacts

1.
2.
3.
4.
5.

Corresponding author:Liu Zeng,zengliu@njupt.edu.cn; Zhang Shao-Hui,shzhang2016@sinano.ac.cn; Tang Wei-Hua,whtang@njupt.edu.cn

Funds:Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 62204125), the Natural Science Research Starting Foundation of Recruiting Talents of Nanjing University of Posts and Telecommunications, China (Grant Nos. XK1060921115, XK1060921002), the Fundamental Research Program of Shanxi Province, China (Grant No. 20210302123388), and the Scientific and Technological Innovation Programs of Higher Education Institutes of Shanxi Province, China (Grant No. 2021L588).

文章全文: translate this paragraph

参考文献

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]

施引文献

下载: 全尺寸图片幻灯片

	波长254 nm			波长365 nm
偏压/V	R/(mA·W^–1)	D^*/Jones	EQE /%	R/(mA·W^–1)	D^*/Jones	EQE/%
–5	2.09	1.60 $ \times $ 10¹¹	1.01	0.22	1.69 $ \times $ 10¹⁰	0.075
–4	2.02	1.80 $ \times $ 10¹¹	0.97	0.16	1.44 $ \times $ 10¹⁰	0.055
–3	1.17	1.92 $ \times $ 10¹¹	0.84	0.13	1.39 $ \times $ 10¹⁰	0.044
–2	1.49	3.00 $ \times $ 10¹¹	0.72	0.10	2.02 $ \times $ 10¹⁰	0.034
–1	1.16	1.52 $ \times $ 10¹¹	0.66	0.07	9.53 $ \times $ 10⁹	0.025
0	0.13	9.37 $ \times $ 10⁹	0.06	0.01	6.18 $ \times $ 10⁸	0.003
1	8.47	4.48 $ \times $ 10¹¹	4.07	0.88	4.68 $ \times $ 10¹⁰	0.300
2	19.28	7.92 $ \times $ 10¹²	9.25	2.08	8.54 $ \times $ 10¹⁰	0.707
3	33.81	1.06 $ \times $ 10¹²	16.23	5.32	1.66 $ \times $ 10¹¹	1.808
4	49.62	1.25 $ \times $ 10¹²	23.98	14.24	3.56 $ \times $ 10¹¹	4.841
5	66.32	1.41 $ \times $ 10¹²	31.84	34.75	7.42 $ \times $ 10¹¹	11.815

下载: 导出CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]
[33]
[34]

[1]	王爱伟, 祝鲁平, 单衍苏, 刘鹏, 曹学蕾, 曹丙强.利用脉冲激光沉积外延制备CsSnBr₃/Si异质结高性能光电探测器. 必威体育下载 , 2024, 73(5): 058503.doi:10.7498/aps.73.20231645
[2]	宜子琪, 王彦明, 王硕, 隋雪, 石佳辉, 杨壹涵, 王德煜, 冯秋菊, 孙景昌, 梁红伟.基于机械剥离制备的PEDOT:PSS/β-Ga₂O₃微米片异质结紫外光电探测器研究. 必威体育下载 , 2024, 73(15): 157102.doi:10.7498/aps.73.20240630
[3]	张盛源, 夏康龙, 张茂林, 边昂, 刘增, 郭宇锋, 唐为华.基于GaN/(BA)₂PbI₄异质结的自供电双模式紫外探测器. 必威体育下载 , 2024, 73(6): 067301.doi:10.7498/aps.73.20231698
[4]	王婉玉, 石凯熙, 李金华, 楚学影, 方铉, 匡尚奇, 徐国华.MoO₃覆盖层对MoS₂基光伏型光电探测器性能的影响. 必威体育下载 , 2023, 72(14): 147301.doi:10.7498/aps.72.20230464
[5]	张茂林, 马万煜, 王磊, 刘增, 杨莉莉, 李山, 唐为华, 郭宇锋.WO₃/β-Ga₂O₃异质结深紫外光电探测器的高温性能. 必威体育下载 , 2023, 72(16): 160201.doi:10.7498/aps.72.20230638
[6]	宁仁霞, 黄旺, 王菲, 孙剑, 焦铮.双明模耦合的双波段类电磁诱导透明研究. 必威体育下载 , 2022, 71(1): 014201.doi:10.7498/aps.71.20211312
[7]	刘增, 李磊, 支钰崧, 都灵, 方君鹏, 李山, 余建刚, 张茂林, 杨莉莉, 张少辉, 郭宇锋, 唐为华.具有大光电导增益的氧化镓薄膜基深紫外探测器阵列. 必威体育下载 , 2022, 71(20): 208501.doi:10.7498/aps.71.20220859
[8]	郭越, 孙一鸣, 宋伟东.多孔GaN/CuZnS异质结窄带近紫外光电探测器. 必威体育下载 , 2022, 71(21): 218501.doi:10.7498/aps.71.20220990
[9]	雷挺, 吕伟明, 吕文星, 崔博垚, 胡瑞, 时文华, 曾中明.光栅局域调控二维光电探测器. 必威体育下载 , 2021, 70(2): 027801.doi:10.7498/aps.70.20201325
[10]	宁仁霞, 黄旺, 王菲, 孙剑, 焦铮.双明模耦合的双波段类电磁诱导透明研究. 必威体育下载 , 2021, (): .doi:10.7498/aps.70.20211312
[11]	杨鹏, 韩天成.极化控制的双波段宽带红外吸收器研究. 必威体育下载 , 2018, 67(10): 107801.doi:10.7498/aps.67.20172716
[12]	李丹, 梁君武, 刘华伟, 张学红, 万强, 张清林, 潘安练.CdS/CdS0.48Se0.52轴向异质结纳米线的非对称光波导及双波长激射. 必威体育下载 , 2017, 66(6): 064204.doi:10.7498/aps.66.064204
[13]	温家乐, 徐志成, 古宇, 郑冬琴, 钟伟荣.异质结碳纳米管的热整流效率. 必威体育下载 , 2015, 64(21): 216501.doi:10.7498/aps.64.216501
[14]	霍永恒, 马文全, 张艳华, 黄建亮, 卫炀, 崔凯, 陈良惠.两端叠层结构的中长波量子阱红外探测器. 必威体育下载 , 2011, 60(9): 098401.doi:10.7498/aps.60.098401
[15]	张伟英, 邬小鹏, 孙利杰, 林碧霞, 傅竹西.ZnO/Si异质结的光电转换特性研究. 必威体育下载 , 2008, 57(7): 4471-4475.doi:10.7498/aps.57.4471
[16]	伍楷舜, 龙兴腾, 董建文, 陈弟虎, 汪河洲.光子晶体异质结的位相和应用. 必威体育下载 , 2008, 57(10): 6381-6385.doi:10.7498/aps.57.6381
[17]	孙晖, 张琦锋, 吴锦雷.基于氧化锌纳米线的紫外发光二极管. 必威体育下载 , 2007, 56(6): 3479-3482.doi:10.7498/aps.56.3479
[18]	刘江涛, 周云松, 王福合, 顾本源.不同晶格光子晶体异质结的界面传导模. 必威体育下载 , 2004, 53(6): 1845-1849.doi:10.7498/aps.53.1845
[19]	刘红, 陈将伟.纳米碳管异质结的结构及其电学性质. 必威体育下载 , 2003, 52(3): 664-667.doi:10.7498/aps.52.664
[20]	李国辉, 周世平, 徐得名.GaAs/AlGaAs异质结动力学行为研究. 必威体育下载 , 2001, 50(8): 1567-1573.doi:10.7498/aps.50.1567

计量

文章访问数:3776
PDF下载量:80
被引次数:0

搜索

留言板