An inactivation mechanism study on Hela cancer cells by means of an atmospheric pressure cold plasma jet is presented. Cell morphology is observed under an inverted microscope after plasma treatment. The neutral red uptake assay provides quantitative evaluations of cell viability under different conditions. The effect of the inactivation efficiency of Hela cancer cells in the argon (900 mL/min) with addition of different amount of oxygen (1%, 2%, 4%, 8%) into atmospheric pressure cold plasma jet is discussed under the fixed power 18 W. Results show that 2% O2 addition provides the best inactivation efficiency, and the survival rate can be reduced to 7% after 180 s treatment. When the oxygen addition exceeds 2%, the inactivation efficiency gradually weakens. The effect is not so good as that in pure argon plasma when the oxygen addition arrives at 8%. According to the emission spectrum of the plasmum, it is concluded that the reactive oxygen species in the plasma play a key role in cancer cell inactivation process.