Based on the ahievement of epitaxial growth in several Perovskite oxide films,we discuss the importance of substrate temperature (Ts) and substrate material in the epitaxial growth of per-ovskite oxide thin films.Influences of Ts on growth orientation and epitaxial threshold temperature were observed.The results indicate that during the growth of the oxide films the phase formation and growth dynamics should be taken into considera tion.The threshold temperature for epitaxial growth depends on the substrate materials.This demonstrates the influence of substrate material on the initial nucleation and epitaxial growth.