The effecte of isothermal and isochronal annealing on the structures of the metal glasses Co50.7Ni19.5Fe7.8Si6B16 and Co42.9Ni27.3Fe7.8Si8B14 have been investigated by the wide angle and the small angle X-ray scattering methods. The experimental results obtained show two types of structure relaxation: The relaxation associated with topographical short range ordering (TSRO) and the relaxation associated with chemical short range ordering (CSRO), and give particularly the direct evidence of the CSRO relaxation process in the amorphous states. The atomic co-operative process of the two types of structure relaxation, and their coexistence and correlation are discussed preliminarily.