The redefinition of the International System of Units (SI) promotes the transformation of the vacuum measurement system to quantization, and the quantization of vacuum parameters is one of the most leading, prospective and subversive research directions in the field of international vacuum metrology, and the quantum vacuum measurement is based on the quantum effect of the microscopic particle system, and the use of optical means and the theory of quantum mechanics to realize the precision measurement of the vacuum parameters. We developed a lithium-cooled atom vacuum measurement apparatus, which mainly consists of a
7Li atom trap system and a continuous expansion vacuum system. In this paper, an experimental study of ultrahigh vacuum measurement was carried out by manipulating
7Li atoms and utilizing the loss characteristics of lithium cold atoms in magneto-optical and magnetic traps, and the results show that, for the four commonly used gas molecules in vacuum, namely N
2, Ar, He, and H
2, in the vacuum range of (3×10
-8~4×10
-5) Pa, the maximum measurement uncertainty is 7.6%~6.0%(
k=2) based on
7Li cold atoms, and the cold atom vacuum measurement results are in good agreement with those of the traditional ionization vacuum gauge, and their relative sensitivities are in good agreement with that of the ionization vacuum gauge, and the maximal deviation of the relative sensitivity factor is less than 8%, which verifies the accuracy and reliability of the cold-atom quantum vacuum measurements. The research results are of great significance in promoting the development of new cross-generation vacuum measurement technology and meeting the needs of space science exploration, ultra-precision measurement and high-end equipment manufacturing.