- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

摘要

自由电子激光光源(free electron laser, FEL)可发出波长为13.5 nm的极紫外(extreme ultra-violet, EUV)辐射, 在EUV光刻领域能够发挥重要作用. 但FEL自身的高相干特性以及类高斯光强轮廓分布特征, 会对成像带来不利影响, 无法满足EUV光刻领域成像应用需求. 本文通过计算模拟的方法, 设计了一种匹配FEL应用的、用于EUV波段去相干和光强均匀化的新型匀光管结构. 模拟结果显示, 针对波长为13.5 nm、直径200 μm、发散度20 mrad的FEL-EUV高斯光束, 采用新型匀光管结构, 与常规匀光管结构相比, 在同等长度和内径时, 具有更显著的去相干能力和光场均匀化作用. 当新型匀光管内径为1 mm、总长度不低于0.6 m、倾斜角度为10 mrad时, 高相干光场完全被扰乱, 实现低相干光输出. 并可获得均匀照明光场, 光强分布不均匀性数值从常规圆柱型匀光管的28.38降低至0.97. 同时, 相应能量传输效率为37.6%, 最大传输效率达到44.58%. 结果表明, 新型匀光管结构能够满足EUV辐射去相干应用需求, 同时可提高照明视场光强分布均匀性, 在EUV光刻领域及其他成像应用具有很大应用前景.

关键词:

Abstract

Free electron laser (FEL) is a high-quality laser source with wavelengths ranging from short-wave X-ray to long-wave infrared ray. Extreme ultra-violet (EUV) radiation at λ= 13.5 nm emitted by FEL can be used in manufacturing integrated circuit, such as EUV lithography exposure and mask defect inspection. However, the high spatial coherence characteristics and similar Gauss intensity profile distribution of FEL source has a negative effect on imaging, and cannot meet the requirements of imaging applications in EUV lithography. In this work, a newly light pipe for decoherence and intensity uniformity in an EUV spectral range is designed through the simulation calculations. The new light pipe consists of two pairs of tilted elements which are symmetrically distributed in the y- zplane and x- zplane, respectively. In this way, the beam transmission divergence in two dimensions can be widened at the same time, and the disturbance of the ray transmission track and spatial phase distribution is increased, so as to achieve the uniformization of light intensity and the reduction of spatial coherence. The simulation results show that for an EUV Gaussian beam at λ= 13.5nm, with a diameter of 200 μm, and a divergence of 20 mrad, the newly designed light pipe has more significant decoherence and illumination field uniformity than the conventional light pipe structure. When the new light pipe has an inner diameter of 1mm, a total length of not less than 600 mm, and a tilt angle of 10mrad , a basically uniform illumination field can be obtained, the coherence is completely disordered, and the non-uniformity of light intensity distribution in the illumination field decreases to 0.97 from 28.38 achieved by conventional cylindrical light pipe. At the same time, the light power transmission efficiency is about 37.6% and the maximum transmission efficiency is about 44.58%. The uniformity can be further improved by increasing the number of reflections. When the inner diameter and tilted angle of the light pipe are unchanged, the length of the light pipe increases to 1m, the non-uniformity of intensity distribution at the illumination field further decreases to 0.90, and the light power transmission efficiency is about 22.35%. The results show that the newly designed light pipe structure can meet the application requirements of decoherence and improve the uniformity of illumination field at EUV wavelength range, and it has great application prospects in EUV lithography and other imaging applications.

Keywords:

作者及机构信息

1.
2.

通信作者:李慧,lihui@ime.ac.cn; 吴晓斌,wuxiaobin@ime.ac.cn

基金项目:国家自然科学基金(批准号: 62071464)和中国科学院前瞻战略科技先导项目(A类先导项目)资助的课题.

Authors and contacts

1.
2.

Corresponding author:Li Hui,lihui@ime.ac.cn; Wu Xiao-Bin,wuxiaobin@ime.ac.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 62071464) and the Foresight Strategic Science and Technology Pilot Project of the Chinese Academy of Sciences (Class A Pilot Project).

文章全文: translate this paragraph

参考文献

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]

施引文献

下载: 全尺寸图片幻灯片

模拟参数	参数值	模拟参数	参数值
光源波长/nm	13.5	光源特征	高斯光源
光源数量/个	2	每个光源功率/W	1
每个光源分析光线数/条	1 × 10⁶	光源发散角 2θ/mrad	20
匀光管总长度L/mm	200—1000	匀光管内径D/mm	1
匀光管倾斜单元倾斜角度α/mrad	10	探测器尺寸/mm	1 × 1
探测器像素数	800 × 800

下载: 导出CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]

[1]	杜小娇, 魏龙, 孙羽, 胡水明.自由电子激光制备高强度亚稳态氦原子和类氦离子. 必威体育下载 , 2024, 73(15): 150201.doi:10.7498/aps.73.20240554
[2]	高城, 刘彦鹏, 严冠鹏, 闫杰, 陈小棋, 侯永, 靳奉涛, 吴建华, 曾交龙, 袁建民.局域热平衡Sn等离子体极紫外辐射不透明度和发射谱的理论研究. 必威体育下载 , 2023, 72(18): 183101.doi:10.7498/aps.72.20230455
[3]	司明奇, 温智琳, 张齐进, 窦银萍, 李博超, 宋晓伟, 谢卓, 林景全.低密度SnO₂靶激光等离子体极紫外光及离带热辐射. 必威体育下载 , 2023, 72(6): 065201.doi:10.7498/aps.72.20222385
[4]	王明军, 王婉柔, 李勇俊.利用平面声场对非均匀大气介质光波传输相位的调控. 必威体育下载 , 2022, 71(16): 164302.doi:10.7498/aps.71.20220484
[5]	谢卓, 温智琳, 司明奇, 窦银萍, 宋晓伟, 林景全.双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射. 必威体育下载 , 2022, 71(3): 035202.doi:10.7498/aps.71.20211450
[6]	谢卓, 温志琳, 司明奇, 窦银萍, 宋晓伟, 林景全.双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射研究. 必威体育下载 , 2021, (): .doi:10.7498/aps.70.20211450
[7]	海帮, 张少锋, 张敏, 董达谱, 雷建廷, 赵冬梅, 马新文.桌面飞秒极紫外光原子超快动力学实验装置. 必威体育下载 , 2020, 69(23): 234208.doi:10.7498/aps.69.20201035
[8]	郭晶, 郭福明, 陈基根, 杨玉军.高频激光脉宽对原子光电子发射谱的影响. 必威体育下载 , 2018, 67(7): 073202.doi:10.7498/aps.67.20172440
[9]	宋文娟, 郭福明, 陈基根, 杨玉军.双色高频激光作用下原子低阶次谐波的理论研究. 必威体育下载 , 2018, 67(3): 033201.doi:10.7498/aps.67.20172129
[10]	黎明, 杨兴繁, 许州, 束小建, 鲁向阳, 黄文会, 王汉斌, 窦玉焕, 沈旭明, 单李军, 邓德荣, 徐勇, 柏伟, 冯第超, 吴岱, 肖德鑫, 王建新, 罗星, 周奎, 劳成龙, 闫陇刚, 林司芬, 张鹏, 张浩, 和天慧, 潘清, 李相坤, 李鹏, 刘宇, 杨林德, 刘婕, 张德敏, 李凯, 陈亚男.太赫兹自由电子激光的受激饱和实验. 必威体育下载 , 2018, 67(8): 084102.doi:10.7498/aps.67.20172413
[11]	戚志明, 梁文耀.表层厚度渐变一维耦合腔光子晶体的反射相位特性及其应用. 必威体育下载 , 2016, 65(7): 074201.doi:10.7498/aps.65.074201
[12]	窦银萍, 谢卓, 宋晓林, 田勇, 林景全.Gd靶激光等离子体6.7nm光源的实验研究. 必威体育下载 , 2015, 64(23): 235202.doi:10.7498/aps.64.235202
[13]	陈鸿, 兰慧, 陈子琪, 刘璐宁, 吴涛, 左都罗, 陆培祥, 王新兵.脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究. 必威体育下载 , 2015, 64(7): 075202.doi:10.7498/aps.64.075202
[14]	施展, 陈来柱, 佟永帅, 郑智滨, 杨水源, 王翠萍, 刘兴军.Terfenol-D/PZT磁电复合材料的磁电相位移动研究. 必威体育下载 , 2013, 62(1): 017501.doi:10.7498/aps.62.017501
[15]	程杨, 姚佰承, 吴宇, 王泽高, 龚元, 饶云江.基于倏逝场耦合的石墨烯波导光传输相位特性仿真与实验研究. 必威体育下载 , 2013, 62(23): 237805.doi:10.7498/aps.62.237805
[16]	陈小艺, 刘曼, 李海霞, 张美娜, 宋洪胜, 滕树云, 程传福.弱散射体产生的菲涅耳极深区散斑场相位涡旋演化的实验研究. 必威体育下载 , 2012, 61(7): 074201.doi:10.7498/aps.61.074201
[17]	颜森林.注入半导体激光器混沌调制性能与内部相位键控编码方法研究. 必威体育下载 , 2006, 55(12): 6267-6274.doi:10.7498/aps.55.6267
[18]	颜森林.光纤混沌相位编码保密通信系统理论研究. 必威体育下载 , 2005, 54(5): 2000-2006.doi:10.7498/aps.54.2000
[19]	曹觉能, 郭旗.不同非局域程度条件下空间光孤子的传输特性. 必威体育下载 , 2005, 54(8): 3688-3693.doi:10.7498/aps.54.3688
[20]	黄敏, 赵晓鹏, 王宝祥, 尹剑波, 曹昌年.电流变液微波反射可调控性. 必威体育下载 , 2004, 53(6): 1895-1899.doi:10.7498/aps.53.1895

计量

文章访问数:960
PDF下载量:48
被引次数:0

搜索

留言板