- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

摘要

SiC以优异的物理性能和良好的工艺性能, 逐渐成为大型空间成像光学系统主镜的首选轻量化光学材料. SiC镜坯制备及加工过程中引入的亚表面缺陷会严重影响最终的镜面质量以及光学系统的成像品质. 针对SiC材料亚表面缺陷的检测问题, 本文采用光热辐射技术进行分析: 分别建立均匀样品的单层理论模型和含空气层缺陷的三层理论模型, 用于计算无缺陷和存在缺陷区域的光热辐射信号. 通过对三层理论模型信号的相位仿真分析, 提出利用相位差-频率曲线的特征频率估算缺陷深度的经验公式; 利用光热辐射装置测量存在亚表面缺陷的SiC样品, 分析缺陷区域的光热辐射信号分布, 利用经验公式计算缺陷深度, 并与缺陷实际深度分布进行对比分析. 实验与计算结果显示, 光热辐射技术能有效探测SiC镜坯的亚表面缺陷及其形貌, 并且对于界面与样品相对平行且较为平缓的亚表面缺陷, 其缺陷深度可通过经验公式准确确定.

关键词:

Abstract

With excellent physical, mechanical and processing properties, silicon carbide (SiC) has gradually become a preferred lightweight optical material for primary mirrors of large space optical systems. The subsurface defects generated during the preparation and processing procedures of SiC will affect the optical quality of the primary mirrors and the imaging performance of the corresponding optical systems employing the SiC primary mirror as well. In this work, photothermal radiation (PTR), a powerful nondestructive testing technique for detecting sub-surface defects of solid materials, is employed to characterize the subsurface defects of bulk SiC material for primary mirrors. Theoretically, three-dimensional one-layer and three-layer PTR theoretical models are developed to describe the defect-free and defect regions of an SiC bulk material. By analyzing the frequency dependence of PTR phase of the SiC bulk material with different defect depths, an empirical formula for estimating the defect depth via a characteristic frequency (appearing at the minimum of the PTR phase-frequency curve) defined thermal diffusion length is proposed, and simulation results show reasonably good agreement between the estimated and simulated defect depths in a depth range of 0.05–0.50 mm. Experimentally, an SiC bulk sample with a subsurface defect region is tested by the PTR via position scanning and modulation frequency scanning to obtain the position and frequency dependent PTR amplitude and phase. From the spatial distributions of PTR amplitude and phase measured at different frequencies and the phase difference frequency curves of measurement positions in the defect region, the depth and shape of the defect region are estimated and found to be in good agreement with the actual shape of the defect region, which is destructively measured via a depth profiler. The experimental and calculated results demonstrate that the PTR is capable of detecting non-destructively the subsurface defects of SiC bulk material. In addition, for subsurface defects with relatively flat interface, the defect depth can be determined accurately by the developed empirical formula.

Keywords:

作者及机构信息

1.
2.

通信作者:李斌成,bcli@uestc.edu.cn

Authors and contacts

1.
2.

Corresponding author:Li Bin-Cheng,bcli@uestc.edu.cn

文章全文: translate this paragraph

参考文献

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]

施引文献

下载: 全尺寸图片幻灯片

点	坐标	缺陷深度/μm		误差
点	坐标	实际值	测量值	绝对误差/μm	相对误差/%
1	(21.0, 19.0)	371.6	392.0	20.4	5.5
2	(20.5, 19.5)	392.0	392.0	0	0
3	(20.2, 20.0)	291.0	276.0	15.0	5.2
4	(20.0, 20.4)	186.9	164.0	22.9	12.3
5	(21.3, 17.2)	80.9	58.5	21.7	27.7
6	(21.0, 18.1)	284.0	392.0	108.0	38.1
7	(20.6, 19.1)	413.9	560.0	146.0	35.5
8	(19.8, 20.8)	118.0	58.5	59.5	50.4

下载: 导出CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]

[1]	陈晶晶, 赵洪坡, 王葵, 占慧敏, 罗泽宇.SiC基底覆多层石墨烯力学强化性能分子动力学模拟. 必威体育下载 , 2024, 73(10): 109601.doi:10.7498/aps.73.20232031
[2]	邓旭良, 冀先飞, 王德君, 黄玲琴.石墨烯过渡层对金属/SiC接触肖特基势垒调控的第一性原理研究. 必威体育下载 , 2022, 71(5): 058102.doi:10.7498/aps.71.20211796
[3]	于子恒, 马春红, 白少先.SiC表面圆环槽边缘效应实验研究. 必威体育下载 , 2021, 70(4): 044702.doi:10.7498/aps.70.20201303
[4]	黄毅华, 江东亮, 张辉, 陈忠明, 黄政仁.Al掺杂6H-SiC的磁性研究与理论计算. 必威体育下载 , 2017, 66(1): 017501.doi:10.7498/aps.66.017501
[5]	卢吴越, 张永平, 陈之战, 程越, 谈嘉慧, 石旺舟.不同退火方式对Ni/SiC接触界面性质的影响. 必威体育下载 , 2015, 64(6): 067303.doi:10.7498/aps.64.067303
[6]	杨帅, 汤晓燕, 张玉明, 宋庆文, 张义门.电荷失配对SiC半超结垂直双扩散金属氧化物半导体场效应管击穿电压的影响. 必威体育下载 , 2014, 63(20): 208501.doi:10.7498/aps.63.208501
[7]	蔡月飞, 吕志伟, 李森森, 王雨雷, 朱成禹, 林殿阳, 何伟明.赫兹型微裂纹光场调制增强作用的系统研究. 必威体育下载 , 2013, 62(23): 234203.doi:10.7498/aps.62.234203
[8]	宋坤, 柴常春, 杨银堂, 张现军, 陈斌.栅漏间表面外延层对4H-SiC功率MESFET击穿特性的改善机理与结构优化. 必威体育下载 , 2012, 61(2): 027202.doi:10.7498/aps.61.027202
[9]	贺平逆, 吕晓丹, 赵成利, 宁建平, 秦尤敏, 苟富均.F原子与SiC(100)表面相互作用的分子动力学模拟. 必威体育下载 , 2011, 60(9): 095203.doi:10.7498/aps.60.095203
[10]	张勇, 张崇宏, 周丽宏, 李炳生, 杨义涛.氦离子注入4H-SiC晶体的纳米硬度研究. 必威体育下载 , 2010, 59(6): 4130-4135.doi:10.7498/aps.59.4130
[11]	张云, 邵晓红, 王治强.3C-SiC材料p型掺杂的第一性原理研究. 必威体育下载 , 2010, 59(8): 5652-5660.doi:10.7498/aps.59.5652
[12]	刘福, 周继承, 谭晓超.3C-SiC(001)-(2×1)表面原子与电子结构研究. 必威体育下载 , 2009, 58(11): 7821-7825.doi:10.7498/aps.58.7821
[13]	黄维, 陈之战, 陈博源, 张静玉, 严成锋, 肖兵, 施尔畏.氢氟酸刻蚀对Ni/6H-SiC接触性质的作用. 必威体育下载 , 2009, 58(5): 3443-3447.doi:10.7498/aps.58.3443
[14]	武煜宇, 陈石, 高新宇, Andrew Thye Shen Wee, 徐彭寿.6H-SiC（0001）-6[KF（]3[KF）]×6[KF（]3[KF）]R30°重构表面的同步辐射角分辨光电子能谱研究. 必威体育下载 , 2009, 58(6): 4288-4294.doi:10.7498/aps.58.4288
[15]	马格林, 张玉明, 张义门, 马仲发.SiC表面C 1s谱最优拟合参数的研究. 必威体育下载 , 2008, 57(7): 4125-4129.doi:10.7498/aps.57.4125
[16]	马格林, 张玉明, 张义门, 马仲发.SiC外延层表面化学态的研究. 必威体育下载 , 2008, 57(7): 4119-4124.doi:10.7498/aps.57.4119
[17]	郜锦侠, 张义门, 汤晓燕, 张玉明.C-V法提取SiC隐埋沟道MOSFET沟道载流子浓度. 必威体育下载 , 2006, 55(6): 2992-2996.doi:10.7498/aps.55.2992
[18]	徐彭寿, 李拥华, 潘海斌.β-SiC(001)-(2×1)表面结构的第一性原理研究. 必威体育下载 , 2005, 54(12): 5824-5829.doi:10.7498/aps.54.5824
[19]	尚也淳, 刘忠立, 王姝睿.SiC Schottky结反向特性的研究. 必威体育下载 , 2003, 52(1): 211-216.doi:10.7498/aps.52.211
[20]	姜振益, 许小红, 武海顺, 张富强, 金志浩.SiC多型体几何结构与电子结构研究. 必威体育下载 , 2002, 51(7): 1586-1590.doi:10.7498/aps.51.1586

计量

文章访问数:3346
PDF下载量:72
被引次数:0

搜索

留言板