The structural properties and local contact potential difference of Au on Si(111)-(7×7) surface are studied by the homemade ultra-high vacuum non-contact Kelvin probe force microscope. Although scanning tunneling microscopy has been widely used to study the metal- adsorbed semiconductor surfaces on an atomic scale, the tunnel current measured by scanning tunneling microscopy is easy to lead the charge states to accidentally switch in the measurement process, and it is limited only to the observation of metal and semiconductor surfaces. Kelvin probe force microscope allows us to directly measure the charges at different positions of various flat surfaces by local contact potential difference on an atomic scale, which has become a more convenient and accurate means of charge characterization. In this paper, the topography and local contact potential difference of Au adsorbed Si(111)-(7×7) surface are measured on an atomic scale by Kelvin probe force microscope at room temperature, and the corresponding adsorption model and first principle calculation are established. The differential charge density distribution of the stable adsorption position of Au/Si(111)-(7×7) is obtained, and the local contact potential energy difference relationship of the stable adsorption position of Au on Si surface is given, The mechanism of charge transfer between Au atom and Si(111)-(7×7) surface during adsorption is analyzed. The experimental results show that at room temperature, single Au atom will form triangular delocalized adsorption state in the half unit cell of Si(111)-(7×7). The delocalized adsorption state is due to the fact that the moving speed of a single Au atom in the HUC is faster than the scanning speed of Kelvin probe force microscope, and the local contact potential difference measurement of Au/Si(111)-(7×7) adsorbed surface can effectively identify Au and Si atoms. Obviously, this research is of great significance in promoting the development of surface charge precision measurement, and is expected to provide some insights into the charge properties of metal adsorbed semiconductor surfaces.