- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

摘要

本文提出一种基于双圆光栅径向剪切干涉仪的三维位移测量方法, 其测量原理是径向剪切干涉仪所形成的莫尔条纹不仅由二维平面内位移决定, 轴向位移会在+1和–1级莫尔条纹之间产生一个特定的相移. 首先, 基于标量衍射理论对双圆光栅径向剪切干涉仪的+1和–1级莫尔条纹强度分布进行推导, 建立了三维位移量与莫尔条纹强度分布的精确解析关系; 其次, 在频谱分析的基础上, 利用半圆环滤波器进行空间滤波, 实现+1和–1级莫尔条纹的同时成像; 然后, 提出了从莫尔条纹图中定量提取三维位移的算法, 并通过数值模拟进行验证; 最后, 实验结果验证了该方法测量平面内位移的最大绝对误差为4.8 × 10 ^–3mm, 平均误差为2.0 × 10 ^–4mm, 轴向位移的最大绝对误差为0.25 mm, 平均误差为8.6 × 10 ^–3mm. 该方法具有装置简单、测量精度高、非接触、瞬时测量等特点, 可实现三维位移的同时测量.

关键词:

Abstract

Moiré patterns formed by overlapping two circular gratings of slightly different pitches have been extensively used for measuring the two-dimensional (2D) and three-dimensional (3D) displacements. However, in the existing applications, Moiré patterns are analyzed based on geometric superposition, by which the 3D displacements cannot be instantaneously or simultaneously measured with a high accuracy. In this paper, radial shearing interferometry with double circular gratings of slightly different pitches is presented to realize the simultaneous measurement of 3D displacements. The measurement is based on the principle that Moiré patterns produced by radial shearing interferometry are determined not only by the 2D in-plane displacements, but also by the out-of-plane displacement that brings about a phase shift between Moiré patterns of +1 and –1 diffraction orders. First, the production mechanism of Moiré patterns by radial shearing interferometry is studied based on the scalar diffraction theory and the intensity distribution of Moiré fringes of +1 and –1 orders is derived to establish the exact analytic relations between Moiré patterns and 3D displacements. Second, on the basis of spectrum characteristics of circular grating, a semicircular ring filter is proposed for spatial filtering to realize the simultaneous imaging of Moiré fringes of +1 and –1 orders. Then, the algorithm to quantitatively extract 3D displacements from Moiré patterns is proposed and demonstrated by numerical simulation. In the algorithm, Moiré patterns in the rectangular coordinate system are transformed into the polar coordinate system and skeletons are extracted to determine the feature points of the bright fringes. The in-plane displacements can be solved by feature points of +1 or –1 diffraction order, and the out-of-plane displacement can be computed by the feature points of +1 and –1 diffraction orders in the same bright fringe. Finally, experimental results prove that the maximum absolute error and mean error for in-plane displacements are 4.8 × 10 ^–3mm and 2.0 × 10 ^–4mm respectively, and 0.25 mm and 8.6 × 10 ^–3mm for out-of-plane displacement. In conclusion, by using the Moiré patterns of +1 and –1 diffraction orders imaged by radial shearing interferometer with double circular gratings of slightly different pitches, the 3D displacement can be simultaneously measured. The method has the advantages of simple device, high measurement accuracy, non-contact and instantaneous measurement, which provides an important guidance for practically measuring the 3D displacements.

Keywords:

作者及机构信息

通信作者:吴慎将,bxait@xatu.edu.cn

基金项目:国家自然科学基金(批准号: 61701385)、装备预先研究领域基金（批准号：61406190121）和预研重点实验室基金（批准号：6142602200407）资助的课题

Authors and contacts

Corresponding author:Wu Shen-Jiang,bxait@xatu.edu.cn

Funds:Project supported by the National Natural Science Foundation of China (Grant No. 61701385), the Foundation of Equipment Pre-research Area of China (Grant No. 61406190121), and Pre-research Foundation of key laboratory (Grant No. 6142602200407)

文章全文: translate this paragraph

参考文献

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]

施引文献

下载: 全尺寸图片幻灯片

Input/mm			Measured/mm			Absolute error/mm
Δ_x	Δ_y	Δ_z	Δ_x	Δ_y	Δ_z	Δ_x	Δ_y	Δ_z
0.00	0.15	7.90	–0.0030	0.1458	7.6978	0.0030	0.0042	0.2022
0.05	0.15	7.90	0.0488	0.1519	7.9868	0.0012	–0.0019	–0.0868
0.10	0.15	7.90	0.0980	0.1487	7.8158	0.0020	0.0013	0.0842
0.15	0.15	7.90	0.1512	0.1548	8.1415	–0.0012	–0.0048	–0.2415
0.20	0.15	7.90	0.2002	0.1458	7.6720	–0.0002	0.0042	0.2280
0.25	0.15	7.90	0.2496	0.1494	7.8628	0.0004	0.0006	0.0372
0.30	0.15	7.90	0.3014	0.1482	7.8078	–0.0014	0.0018	0.0922
0.35	0.15	7.90	0.3516	0.1544	8.1468	–0.0016	–0.0044	–0.2468
Mean error						0.0003	0.0001	0.0086

下载: 导出CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]

[1]	王松, 周闯, 李素文, 牟福生.基于法布里-珀罗干涉仪测量大气环境CO₂的方法. 必威体育下载 , 2024, 73(2): 020702.doi:10.7498/aps.73.20231224
[2]	陈子涵, 宋梦齐, 陈恒, 王志立.双三角形相位光栅X射线干涉仪的条纹可见度. 必威体育下载 , 2023, 72(14): 148701.doi:10.7498/aps.72.20230461
[3]	孙思彤, 丁应星, 刘伍明.基于线性与非线性干涉仪的量子精密测量研究进展. 必威体育下载 , 2022, 71(13): 130701.doi:10.7498/aps.71.20220425
[4]	潘良泽, 刘诚, 朱健强.基于时域剪切干涉的纳秒脉冲相位测量技术. 必威体育下载 , 2021, 70(18): 184202.doi:10.7498/aps.70.20202104
[5]	陈斌, 龙金宝, 谢宏泰, 陈泺侃, 陈帅.可移动三维主动减振系统及其在原子干涉重力仪上的应用. 必威体育下载 , 2019, 68(18): 183301.doi:10.7498/aps.68.20190443
[6]	李诗宇, 田剑锋, 杨晨, 左冠华, 张玉驰, 张天才.探测器对量子增强马赫-曾德尔干涉仪相位测量灵敏度的影响. 必威体育下载 , 2018, 67(23): 234202.doi:10.7498/aps.67.20181193
[7]	兰斌, 冯国英, 张涛, 梁井川, 周寿桓.用于透明平板平行度和均匀性测量的单元件干涉仪. 必威体育下载 , 2017, 66(6): 069501.doi:10.7498/aps.66.069501
[8]	王建波, 钱进, 刘忠有, 陆祖良, 黄璐, 杨雁, 殷聪, 李同保.计算电容中Fabry-Perot干涉仪测量位移的相位修正方法. 必威体育下载 , 2016, 65(11): 110601.doi:10.7498/aps.65.110601
[9]	颜召军, 陈欣扬, 杨朋千, 周丹, 郑立新, 朱能鸿.基于光栅色散干涉条纹的菲佐光干涉望远镜共相检测方法研究. 必威体育下载 , 2015, 64(14): 149501.doi:10.7498/aps.64.149501
[10]	谭林秋, 华灯鑫, 汪丽, 高飞, 狄慧鸽.Mach-Zehnder干涉仪条纹成像多普勒激光雷达风速反演及视场展宽技术. 必威体育下载 , 2014, 63(22): 224205.doi:10.7498/aps.63.224205
[11]	王琛, 安红海, 王伟, 方智恒, 贾果, 孟祥富, 孙今人, 刘正坤, 付绍军, 乔秀梅, 郑无敌, 王世绩.利用软X射线双频光栅剪切干涉技术诊断金等离子体. 必威体育下载 , 2014, 63(12): 125210.doi:10.7498/aps.63.125210
[12]	杜军, 赵卫疆, 曲彦臣, 陈振雷, 耿利杰.基于相位调制器与Fabry-Perot干涉仪的激光多普勒频移测量方法. 必威体育下载 , 2013, 62(18): 184206.doi:10.7498/aps.62.184206
[13]	文峰, 武保剑, 李智, 李述标.基于全光纤萨格纳克干涉仪的温度不敏感磁场测量. 必威体育下载 , 2013, 62(13): 130701.doi:10.7498/aps.62.130701
[14]	刘正坤, 邱克强, 陈火耀, 刘颖, 徐向东, 付绍军, 王琛, 安红海, 方智恒.软X射线双频光栅剪切干涉法研究. 必威体育下载 , 2013, 62(7): 070703.doi:10.7498/aps.62.070703
[15]	代海山, 张淳民, 穆廷魁.宽场、消色差、温度补偿风成像干涉仪中次级条纹研究. 必威体育下载 , 2012, 61(22): 224201.doi:10.7498/aps.61.224201
[16]	雷亮, 文锦辉, 焦中兴, 赖天树, 林位株.飞秒脉冲振幅和相位的无干涉条纹重构法测量. 必威体育下载 , 2008, 57(1): 307-312.doi:10.7498/aps.57.307
[17]	朱常兴, 冯焱颖, 叶雄英, 周兆英, 周永佳, 薛洪波.利用原子干涉仪的相位调制进行绝对转动测量. 必威体育下载 , 2008, 57(2): 808-815.doi:10.7498/aps.57.808
[18]	阮锴, 张淳民, 赵葆常.高层大气风场探测改型大光程差Sagnac干涉仪全视场角光程差与横向剪切量的精确计算. 必威体育下载 , 2008, 57(9): 5435-5441.doi:10.7498/aps.57.5435
[19]	舒学文, 黄德修, 邓桂华, 施伟, 江山.基于单个光纤光栅的Sagnac干涉仪的理论与实验研究. 必威体育下载 , 2000, 49(9): 1731-1735.doi:10.7498/aps.49.1731
[20]	倪育才, 王邦益.用改进的瑞利干涉仪精确测量空气折射率. 必威体育下载 , 1977, 26(1): 90-92.doi:10.7498/aps.26.90

计量

文章访问数:5066
PDF下载量:95
被引次数:0

搜索

留言板