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铁电负电容场效应晶体管可以突破传统金属氧化物半导体场效应晶体管中的玻尔兹曼限制, 将亚阈值摆幅降低到60 mV/dec以下, 极大地改善了晶体管的开关电流比和短沟道效应, 有效地降低了器件的功耗, 为实现晶体管特征尺寸的减小和摩尔定律的延续提供了选择. 本文分析总结了国内外近年来关于铁电负电容场效应晶体管代表性的研究进展, 为进一步研究提供参考. 首先介绍了铁电负电容场效应晶体管的研究背景及其意义; 然后总结了铁电材料的基本性质和种类, 并对铁电材料负电容的物理机制和铁电负电容场效应晶体管的工作原理进行了讨论; 接下来从器件沟道材料维度的角度, 分别总结了最近几年基于三维沟道材料和二维沟道材料且与氧化铪基铁电体结合的铁电负电容场效应晶体管的研究成果, 并对器件的亚阈值摆幅、开关电流比、回滞电压和漏电流等性能的改善进行了分析概述; 最后对铁电负电容场效应晶体管目前存在的问题和未来的发展方向作了总结与展望.
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关键词:
- 铁电负电容场效应晶体管/
- 氧化铪基铁电体/
- 三维沟道材料/
- 二维沟道材料
Ferroelectric negative capacitance field effect transistors(Fe-NCFETs) can break through the so-called “Boltzmann Tyranny” of traditional metal oxide semiconductor field effect transistors and reduce the subthreshold swing below 60 mV/dec, which could greatly improve the on/off current ratio and short-channel effect. Consequently, the power dissipation of the device is effectively lowered. The Fe-NCFET provides a choice for the downscaling of the transistor and the continuation of Moore’s Law. In this review, the representative research progress of Fe-NCFETs in recent years is comprehensively reviewed to conduce to further study. In the first chapter, the background and significance of Fe-NCFETs are introduced. In the second chapter, the basic properties of ferroelectric materials are introduced, and then the types of ferroelectric materials are summarized. Among them, the invention of hafnium oxide-based ferroelectric materials solves the problem of compatibility between traditional ferroelectric materials and CMOS processes, making the performance of NCFETs further improved. In the third chapter, the advantages and disadvantages of Fe-NCFETs with MFS, MFIS and MFMIS structures are first summarized, then from the perspective of atomic microscopic forces the “S” relationship curve of ferroelectric materials is derived and combined with Gibbs free energy formula and L-K equation, and the intrinsic negative capacitance region in the free energy curve of the ferroelectric material is obtained. Next, the steady-state negative capacitance and transient negative capacitance in the ferroelectric capacitor are discussed from the aspects of concept and circuit characteristics; after that the working area of negative capacitance Fe-NCFET is discussed. In the fourth chapter, the significant research results of Fe-NCFETs combined with hafnium-based ferroelectrics in recent years are summarized from the perspective of two-dimensional channel materials and three-dimensional channel materials respectively. Among them, the Fe-NCFETs based on three-dimensional channel materials such as silicon, germanium-based materials, III-V compounds, and carbon nanotubes are more compatible with traditional CMOS processes. The interface between the channel and the ferroelectric layer is better, and the electrical performance is more stable. However, thereremain some problems to be solved in three-dimensional channel materials such as the limited on-state current resulting from the low effective carrier mobility of the silicon, the small on/off current ratio due to the leakage caused by the small bandgap of the germanium-based material, the poor interfacial properties between the III-V compound materials and the dielectric layer, and the ambiguous working mechanism of Fe-NCFETs based on carbon nanotube. Compared with Fe-NCFETs based on three-dimensional channel materials, the Fe-NCFETs based on two-dimensional channel materials such as transition metal chalcogenide, graphene, and black phosphorus provide the possibility for the characteristic size of the transistor to be reduced to 3 nm. However, the interface performance between the two-dimensional channel material and the gate dielectric layer is poor, since there are numerous defect states at the interface. Furthermore, the two-dimensional channel materials have poor compatibility with traditional CMOS process. Hence, it is imperative to search for new approaches to finding a balance between device characteristics. Finally, the presently existing problems and future development directions of Fe-NCFETs are summarized and prospected.-
Keywords:
- ferroelectric negative capacitance field effect transistors/
- hafnia-based ferroelectrics/
- three-dimensional channel materials/
- two-dimensional channel materials
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MOS structure Channel materials Gate structure Ferroelectric materials tFE/nm SSmin/
(mV·dec–1)Hysteresis/V Orders
ofIDSVD/V ION/IOFF Year Ref. Planar p-Si MFIS Hf0.65Zr0.35O2 30 5 — — –0.5 104 2014 [115] Planar n-Si MFIS HfAlO (Al: 6%) 10 Sub-25 0.02 4 0.2 108 2017 [116] Planar n-Si MFIS Hf0.75Zr0.25O2 10 40 Free 1 0.2 107 2018 [119] Planar n-Si MFIS Hf0.53Zr0.47O2 5 ~40 ~0.1 2 0.2 107 2019 [121] Planar n-Si MFIS HfAlO (Al: 4%) 10 Sub-30 0.02 4 0.2 108 2019 [118] FinFET n-Si MFIS Hf0.5Zr0.5O2 4 Sub-30 0.003 2 0.05 107 2018 [25] FinFET n-Si MFMIS Hf0.42Zr0.58O2 5 58 0.003 1 0.1 105 2015 [123] FinFET n-Si MFIS Hf0.5Zr0.5O2 5 Sub-60 Free — 0.1 107 2019 [125] FinFET p-Si MFMIS Hf0.42Zr0.58O2 3 34.5 0.009 2 –0.05 104 2019 [124] FinFET n-Si MFIS Hf0.5Zr0.5O2 5 Sub-60 Free — 0.1 107 2019 [125] GAA poly n-Si MFIS Hf0.5Zr0.5O2 10 26.84 0.003 4 0.1 108 2019 [126] Planar p-Ge MFMIS Hf0.5Zr0.5O2 6.5 43 2.34 1 –0.05 103 2016 [129] Planar p-GeSn MFMIS Hf0.5Zr0.5O2 6.5 40 0.41 2 –0.05 103 2016 [129] Planar p-GeSn MFMIS Hf0.5Zr0.5O2 6 Sub-20 < 0.01 2 –0.05 104 2017 [130] Planar p-Ge MFMIS Hf0.5Zr0.5O2 4.5 ~87.5 Free — –0.05 103 2019 [156] Planar p-Ge MFIS Hf0.67Zr0.33O2 7 ~125 ~0.105 — –0.5 104 2019 [134] Planar n-InGaAs MFIS Hf0.5Zr0.5O2 8 23 ~0.2 3 0.05 105 2018 [136] FinFET n-InGaAs MFIS Hf0.5Zr0.5O2 5 23 0.2 1 0.05 103 2019 [137] GAA nanotube MFMIS HfAlO(Al: 7%) 10 ~45 — — 0.05 104 2018 [138] 2D-FET MoS2 MFMIS Hf1-xZrxO2 15 Sub-60 1.2 3 0.5 105 2017 [146] 2D-FET MoS2 MFMIS Hf0.5Zr0.5O2 15 6.07 0.5 4 0.5 105 2017 [33] 2D-FET MoS2 MFMIS HfAlO(Al:7.3%) 10 57 0.5 4 0.5 105 2017 [108] 2D-FET MoS2 MFMIS HfZrOx 15 47 2.5 1 0.1 106 2018 [30] 2D-FET MoS2 MFIS Hf0.5Zr0.5O2 20 Sub-60 < 0.005 4 0.5 106 2018 [147] 2D-FET MoS2 MFIS Hf0.5Zr0.5O2 20 23 0.077 6 0.1 109 2017 [144] 2D-FET WSe2 MFMIS Hf0.5Zr0.5O2 20 14.4 0.12 2 –0.1 105 2018 [140] 2D-FET WSe2 MFIS Hf0.5Zr0.5O2 10 18.2 0.02 4 –0.1 104 2018 [148] 2D-FET Graphene MFS HfAlO(Al:9.5%) 5 — — — 0.1 2.75 2016 [154] 2D-FET BP MFMIS Hf0.5Zr0.5O2 20 104 0.5 — 0.1 102 2019 [155] -
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