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摘要

激光外差干涉测量技术是微振动探测的重要手段, 随着微纳应用的拓展, 人们对精密测量系统的相位检测灵敏度提出了更高的要求. 传统提高测量灵敏度的方法有优化外差干涉系统方案、改进相位重建算法和降低关键器件噪声等. 本文提出了一种多光束混合干涉的相位增强方法, 经过理论推导和实验验证得到如下近似条件: 校正光与信号光的初相位相差π rad情况下, 两光束的功率越接近, 系统对目标的弱振动振幅响应越大. 实验设计的两光束功率相差1%时, 观察到了最大146 倍的增强效果, 该方法在微振动物体高灵敏度测量上具有较大的应用价值, 在现有器件指标和相位解调算法不变的基础上可大幅提高外差干涉测量系统的探测能力.

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Abstract

Laser Doppler vibrometer can measure the displacement, velocity, acceleration and other parameters of vibration target. It has the characteristics of non-contact, high precision and long distance. So, it has a great advantage for the vibration measurement in a special working environment, where the target is light and thin, hard to contact, hard to approach. Laser heterodyne interferometry is an important means of detecting the micro vibration. With the development of micro vibration application, the sensitivity of phase measurement is highly required. Traditionally, there are several ways of improving the measurement sensitivity, such as optimizing the heterodyne interference scheme, improving the phase reconstruction algorithm and reducing the noise of key devices and so on. However, based on the analysis of the influence of stray light in the system, it is found that the controllable multi-beam interference can greatly improve the detection capability of the system. Therefore, a phase enhancement technique of multi-beam hybrid interference is proposed to meet the needs of high sensitivity detection of micro vibration. In this paper the physical mechanism and boundary conditions of phase enhancement are investigated in detail, and the quantitative relationship between the boundary conditions and phase enhancement is also analyzed thereby providing a technical reference for the enhancement detection of micro vibration targets. Through the numerical simulation and experimental verification, the following boundary conditions are obtained: the initial phase difference between the correction light and the signal light is π rad and the closer the power values of the two beams, the greater the enhancement effect of the demodulation phase is. The power difference between the two beams designed in the experiment is 1%, which means that detection capability is enhanced by 146 times. It has great application value in the high sensitivity measurement of micro vibration objects. This technology can also enhance the detection capability of heterodyne interference measurement system without changing the existing device index or phase demodulation algorithm.

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作者及机构信息

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通信作者:张文喜,zhangwenxi@aoe.ac.cn

基金项目:国家自然科学基金青年科学基金(批准号: 61605217)

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Corresponding author:Zhang Wen-Xi,zhangwenxi@aoe.ac.cn

Funds:Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 61605217)

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施引文献

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