- 必威体育下载

姓名
邮箱
手机号码
标题
留言内容
验证码

摘要

随着CMOS工艺的发展, 热载流子效应对沟道热噪声的影响随着器件尺寸的降低而增大, 传统热噪声模型未能准确表征沟道的热噪声. 本文通过解能量平衡方程, 得到电子温度表达式, 并结合沟道漏电流表达式, 建立了沟道热噪声模型. 利用建立的电子温度表达式, 该热噪声模型考虑了热载流子效应的影响, 并且在计算热噪声的过程中考虑了电子温度对迁移率降低的影响以及温度梯度对热噪声的影响. 通过分析与计算, 结果显示, 随着器件尺寸的减小, 温度梯度对电子温度产生显著影响, 使得热载流子效应的影响增大, 热载流子效应对热噪声的增长作用超过了迁移率降低对热噪声的减小作用, 最终导致热噪声增大. 本文建立的沟道热噪声模型可应用于纳米尺寸金属-氧化物半导体场效应晶体管器件的噪声性能分析及建模.

关键词:

Abstract

With the development of the integrated circuit manufacturing process, the device dimensions have been on a nanoscale, while the device performance, such as the mobility and thermal noise, is significantly affected by the hot-carrier effect, which further affects the channel thermal noise of the device. However, the thermal noise model based on the existing electron temperature expression does not take into account the influence of the temperature gradient on the electron temperature when it deals with the influence of the hot carrier effect. As the size of the device decreases, the thermal noise model based on the existing electron temperature expression underestimates the influence of the hot carrier effect and the channel thermal noise cannot be accurately predicted with this expression. In this paper, the expression of the channel transverse electric field is derived based on the channel potential equation and the boundary condition of the channel electric field. By combining the distribution of the temperature gradient and the expression of the transverse electric field, the energy balance equation is solved with considering the influence of the temperature gradient, and then the electron temperature expression is obtained. The electron temperature expression shows the distribution of the electron temperature along the channel. By utilizing the derived electron temperature expression and combining with the drain current expression, a channel thermal noise model is established. The hot carrier effect is taken into account in the thermal noise model by utilizing the proposed electron temperature expression. Meanwhile in calculating the thermal noise, the influence of the electron temperature on mobility degradation and the temperature gradient on thermal noise are also involved. The results show that the temperature gradient has a significant influence on the electron temperature with the reduction of the device size, which further increases the influence of the hot carrier effect, resulting in the increase of the thermal noise caused by the hot carrier effect exceeding the decrease of the thermal noise caused by the mobility degradation, thus leading the thermal noise to increase. The influence of the hot carrier effect on the channel thermal noise also increases significantly with the bias increasing. The channel thermal noise model proposed in this paper can be applied to analyzing the noise performance and modeling the nano-sized MOSFET devices.

Keywords:

作者及机构信息

通信作者:姚若河,phrhyao@scut.edu.cn

基金项目:国家级-国家自然科学基金面上项目(GrantNo.61274085)

Authors and contacts

Corresponding author:Yao Ruo-He,phrhyao@scut.edu.cn

文章全文: translate this paragraph

参考文献

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]

施引文献

下载: 全尺寸图片幻灯片

参数	数值
v_sat/m·s^–1	1.0 ×10⁵
σ	0.02
t_ox/nm	1
θ/V^–1	1.058
ε_Si/F·cm^–1	11.7 × (8.85 × 10^–14)
ε_ox/F·cm^–1	3.9 × (8.85 × 10^–14)
λ	5.23

下载: 导出CSV

[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8]
[9]
[10]
[11]
[12]
[13]
[14]
[15]
[16]
[17]
[18]
[19]
[20]
[21]
[22]
[23]
[24]
[25]
[26]
[27]
[28]
[29]
[30]
[31]
[32]

[1]	申双林, 张小坤, 万兴文, 郑克晴, 凌意瀚, 王绍荣.固体氧化物燃料电池温升模拟中入口异常高温度梯度研究. 必威体育下载 , 2022, 71(16): 164401.doi:10.7498/aps.71.20220031
[2]	张梦, 姚若河, 刘玉荣, 耿魁伟.短沟道金属-氧化物半导体场效应晶体管的散粒噪声模型. 必威体育下载 , 2020, 69(17): 177102.doi:10.7498/aps.69.20200497
[3]	何玉娟, 章晓文, 刘远.总剂量辐照对热载流子效应的影响研究. 必威体育下载 , 2016, 65(24): 246101.doi:10.7498/aps.65.246101
[4]	刘宸, 孙宏祥, 袁寿其, 夏建平.基于温度梯度分布的宽频带声聚焦效应. 必威体育下载 , 2016, 65(4): 044303.doi:10.7498/aps.65.044303
[5]	高启, 张传飞, 周林, 李正宏, 吴泽清, 雷雨, 章春来, 祖小涛.Z箍缩Al等离子体X辐射谱线的分离及电子温度的提取. 必威体育下载 , 2014, 63(9): 095201.doi:10.7498/aps.63.095201
[6]	段萍, 曹安宁, 沈鸿娟, 周新维, 覃海娟, 刘金远, 卿绍伟.电子温度对霍尔推进器等离子体鞘层特性的影响. 必威体育下载 , 2013, 62(20): 205205.doi:10.7498/aps.62.205205
[7]	崔江维, 余学峰, 任迪远, 卢健.沟道宽长比对深亚微米NMOSFET总剂量辐射与热载流子损伤的影响. 必威体育下载 , 2012, 61(2): 026102.doi:10.7498/aps.61.026102
[8]	蒙世坚, 李正宏, 秦义, 叶繁, 徐荣昆.X射线连续谱法诊断铝丝阵Z箍缩等离子体温度. 必威体育下载 , 2011, 60(4): 045211.doi:10.7498/aps.60.045211
[9]	孟广为, 李敬宏, 裴文兵, 李双贵, 张维岩.温度梯度对平面金壁发射能流平衡性的影响. 必威体育下载 , 2011, 60(2): 025210.doi:10.7498/aps.60.025210
[10]	陈曦, 王霞, 吴锴, 彭宗仁, 成永红.温度梯度场对电声脉冲法空间电荷测量波形的影响. 必威体育下载 , 2010, 59(10): 7327-7332.doi:10.7498/aps.59.7327
[11]	朱樟明, 钟波, 郝报田, 杨银堂.一种考虑温度的分布式互连线功耗模型. 必威体育下载 , 2009, 58(10): 7124-7129.doi:10.7498/aps.58.7124
[12]	曹士英, 宋振明, 秦瑀, 王清月, 张志刚.飞秒激光在不同位置温度梯度的惰性气体中成丝及光谱展宽的差异. 必威体育下载 , 2009, 58(6): 3971-3976.doi:10.7498/aps.58.3971
[13]	周桂耀, 侯峙云, 李曙光, 韩颖, 侯蓝田.微结构光纤制备过程中不同位置空气孔的形变量分析. 必威体育下载 , 2007, 56(11): 6486-6489.doi:10.7498/aps.56.6486
[14]	郭庆林, 周玉龙, 张博, 张秋琳, 张金平, 怀素芳.减压氩气下基体对激光微等离子体电子温度的影响. 必威体育下载 , 2007, 56(9): 5318-5322.doi:10.7498/aps.56.5318
[15]	陈卓, 何威, 蒲以康.电子回旋共振氩等离子体中亚稳态粒子数密度及电子温度的测量. 必威体育下载 , 2005, 54(5): 2153-2157.doi:10.7498/aps.54.2153
[16]	黄　松, 宁兆元, 辛　煜, 甘肇强.CF4气体ICP等离子体中的双温电子特性. 必威体育下载 , 2004, 53(10): 3394-3397.doi:10.7498/aps.53.3394
[17]	杨家敏, 丁耀南, 陈波, 郑志坚, 杨国洪, 张保汉, 王耀梅, 张文海.等电子法测量小能量激光打靶等离子体电子温度. 必威体育下载 , 2003, 52(2): 411-414.doi:10.7498/aps.52.411
[18]	陈波, 郑志坚, 丁永坤, 李三伟, 王耀梅.双示踪元素X射线能谱诊断激光等离子体电子温度. 必威体育下载 , 2001, 50(4): 711-714.doi:10.7498/aps.50.711
[19]	任红霞, 郝跃, 许冬岗.N型槽栅金属-氧化物-半导体场效应晶体管抗热载流子效应的研究. 必威体育下载 , 2000, 49(7): 1241-1248.doi:10.7498/aps.49.1241
[20]	任红霞, 郝跃.新型槽栅PMOSFET热载流子退化机理与抗热载流子效应研究. 必威体育下载 , 2000, 49(9): 1683-1688.doi:10.7498/aps.49.1683

计量

文章访问数:6627
PDF下载量:64
被引次数:0

搜索

留言板