We report the experiment data of X-ray spectra produced by the impact of Xeq+ (q=10, 15, 20, 26) with 2.4 MeV kinetic energy on Au surface in the National Laboratory of Heavy Ion Research Facility in Lanzhou. Results show that there is different broadening of Au M X-ray owing to multiply ionized effect in the collision with heavy ions, the degree of ionization mainly depends on the distribution of the electronic states in the ions' outer shell. The yield of X-ray is calculated and compared with BEA (binary encounter approximation) model, and the effect of ion charge state on the X-ray yield is also discussed.