Taking advantage of triple radio frequency, hydrocarbon polymer films are fabricated at different powers by the glow discharge polymerization technology. The deposition rates, the chemical structures, the atomic ratios and the optical properties are studied. The thicknesses of glow discharge polymer (GDP) films are measured by the surface profiler technology. The chemical compositions of GDP films are characterized by FT-IR spectra and element analysis. The optical properties of GDP films are investigated by UV-VIS spectra. With RF power increasing from 20 W to 60 W, the deposition rate of GDP films first increases 0.34 μ m/h, then decreases after the RF power reaches 40 W. In visible light area more than 500 nm, the optical transmittances of all GDP films are more than 90%.The optical band gaps of GDP films first decrease, then reaches the minimum at the RF power of 50 W, then increases when the RF power increases from 20 W to 60 W.