In order to effectively analyze the statistical power consumption of RC interconnect tree with process fluctuation, a method of constructing interconnect parasitic parameters and driving point admittance moments is first presented in this paper. Then, the expressions of mean and standard deviations of interconnect power consumption are obtained. The calculation results indicate that the errors of mean and standard deviations are less than 4.36 % and 6.68 % respectively compared with those calculated by the widely used Monte Carlo method. Results show that the proposed method has a good accuracy and high efficiency.