In this paper, a kinetic model for the radiation-induced production of the intrinsic point defect E′ center is proposed. The results show that E′ center concentration increases linearly with dose in low dose regions, and it tends to saturate in high dose regions. Further, it is found that E′ center is dual exponential function of dose, and the saturate state collapses if the second reaction is considered. The theoretical result is in good agreement with the experiment.