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用苯作为源气体,使用微波电子回旋共振(ECR)等离子体气相沉积法在不同温度下制备了含 氢非晶碳薄膜,研究了沉积温度对薄膜的直流电阻率、击穿场强的影响,发现它们与沉积速 率密切相关.测量了薄膜的含氢量与Raman谱,利用Angus等人提出的随机共价网络模型对结果 作了分析.
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关键词:
- 非晶碳薄膜/
- ECR等离子体化学气相沉积/
- 直流电阻
Hydrogenated amorphous carbon films were deposited using ECR plasma with benzene as carbon source at varying substrate temperature. The effects of deposition te mperature on the resistivity and the intensity of electric break down have been investigated. The results show these properties depend on their growth condition s. The experiment results are further investigated using Raman spectra analysis.-
Keywords:
- amorphous carbon film/
- ECR plasma/
- electrical property
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