Individual sputtering angular distributions and partial sputtering yields of Ni and Pd from Ni-Pd alloy have been measured at different temperatures, by using the Rutherford back-scattering spectrometry (RBS). The experimental results indicate that the partial sputtering yields of both Ni and Pd have a great change near the Curie temperature (the temperature of magnetic phase-transition of Ni-Pd alloy). Furthermore, the change of Pd partial sputtering: yield is greater than that of Ni. Ni is the preferentially sputtering element, but its preferential sputtering extent decreases during the magnetic phase-transition as taget temperature increases. The phenomena seem to be caused by the reduction of surface binding energies during the magnetic phase-transition, the surface segregation and the enhanced diffusion induced by-ion bombardment.